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Aligned nanofibers, filament bundle composed of large number of nanofibers have potential applications such as biomaterials, composite materials etc. A series of electrospinning experiment has been conducted to investigate the electrospinning process, through which, some parameters such as polymer solution concentration, bias voltage, distance between spinneret and collector, solution flow rate etc...
This paper reports the development of a polycrystalline diamond (poly-C) thin film encapsulation packaging process which is integrated into the MEMS cantilever resonator fabrication. The high Young's modulus and chemical stability of poly-C make it an excellent candidate material for a thin film package. A test chip is fabricated using a 4-mask process. First, poly-C cantilever beam resonator is fabricated...
In this paper, nano-porous silica aerogels were prepared via sol-gel process with acid/base two-step catalysis technique. Silica aerogel structure can be effectively controlled by changing experimental parameter. Ultralow density silica aerogel with density as low as 3.4 mg/cm3 has been successfully prepared. Transmission electron microscope (TEM), gas chromatography/mass spectrometry (GC/MS) and...
Due to the trade secrets and intellectual property, there are still many aspects of MEMS switches which are not understand well and are currently under investigation. In this paper, our report shows that MEMS can be released using O2 and a little carbon powder at the same time. The relationship between the removing polyimide time and the cure temperature is presented using carbon powder in the quartz...
The micro-flow systems have been extensively introduced into the micro-devices in Microelectromechanical System(MEMS), and the flowing characteristics determines the performance of the micro-devices to a great extent. Here, the experiments of characteristics of distilled water flow in a series of round quartz microchannels with the diameters of 13mum, 20mum and the lengths ranging from 40 mm to 100...
Ferromagnetic sensors and actuators have been extensively studied on the microscale and have led to the development of optical switches [Judy, JW & Muller, RS, 1997], magnetically-tunable frequency-selective surfaces [Zendejas, J, et al., 2002], magnetic assembly of out-of-plane-MEMS devices [Chen, J, et al., 2001], and low-power to zero-power magnetometers [Yang, HH, et al., 2002; Vasquez, DJ...
In this paper, we have investigated the characteristics of a thermopneumatic-actuated polydimethylsiloxane (PDMS) microfluidic system integrated with a micropump and microvalves on the same structure. A thermopneumatic-actuated PDMS microfluidic system has been fabricated and its properties are characterized. The advantages of proposed microfluidic system are disposable, low cost fabrication process...
The CO2 bubbles clogging in anode flow field is a vital problem in development of liquid feed micro direct methanol fuel cells (μDMFC). In order to study the CO2 bubbles clogging behavior, an air-breathing transparent μDMFC with 180 μm wide serpentine channels in anode was fabricated. In situ visual investigation of the bubbles behavior in anode flow field was implemented on the microfluidics test...
In this work, we fabricated GaN hollow nanorods by using inductively coupled plasma (ICP) etching. We found that tops of these nanotubes were hexagonal with the c-axis perpendicular to substrate surface. We also found that density of the GaN nanorods were not strongly dependent on etching parameters, which suggests that the formation of these GaN nanotubes was related to the dislocation density in...
In this work, the transportation of nano-particles inside micro-channels with nano-sized gaps and various geometries is investigated. Numerical simulations based on fluid governing equations in Eulerian coordinate and particle motion equations in Lagrangian coordinate are employed and the effects caused by parameters including curvature and branching angle of micro-channel, nano-gap size, and the...
A novel minimally invasive way to measure the diabetic's real-time blood glucose concentration in vitro is proposed by combining interstitial fluid transdermal extraction ultrasonically and surface plasma resonance detecting. Low-frequency ultrasound is employed to enhance the skin permeability to interstitial fluid by disrupting the stratum corneum lipid bilayers and then interstitial fluid is extracted...
This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and...
The bio-heat transfer problem and the thermal ablation in bio-tissue require general solutions for the control of the external heating power. An algorithm based on the molecular dynamics (MD) and the GROMACS protein data bank is developed to solve the bio-heat transfer problem. The value of the thermal conductivity of alanine is calculated from the autocorrelation function of the Green-Kubo formalism...
Bamboo-shaped multiwall carbon nanotubes (BS-MWCNTs) activated by KOH with different KOH/CNT mass ratio are applied as electrodes for supercapacitors. The electrochemical capacitance of activated bamboo-shaped multiwall carbon nanotubes (ABS-MWCNTs) with KOH/CNT mass ratio 3:1 and 7:1 is 1.5 and 3 times that of the normal BS-MWCNTs, respectively. The activated materials still possess nanotubular morphology...
This paper reports the fabrication technology and testing of polycrystalline diamond (poly-C) mechanical resonators with dimensions as small as 100 nm for the first time. The fabricated structures include cantilever structures patterned using electron beam lithography to have widths of 100 nm, and torsional paddle resonators with a support beam width of 0.5 mum, which sustained a proof mass around...
Multiwall and singlewall carbon nanotubes were used as precursors for preparing metal ion-decorated nanotubes. The activated nanotubes catalyze metal deposition specifically onto their surfaces upon wetting the surface of nanotubes. K+ , Cu2+ , Mg2+ , Ca2+ and Fe3+ decorated singlewall and multiwall carbon nanotubes, were screened for the catalytic activity in reactive violet dye waste water decomposition...
In this paper the Al2O3 nanowire is grown on silicon chips by electrochemical reaction under AFM probe. The obtained Al2O3 nanowire is regular arranged, the length and width of the nanowire can be controlled by adjusting applied voltage and scanning rate of AFM probe
The golden-like (Ti, Zr)N film with nanometer level, which has higher rigidity and better corrosion resistance than TiN film, was deposited by reactive magnetron sputtering on slides and Al substrates. The crystalline phase was analyzed by XRD, morphology and electronic structures were detected by atomic force microscopy (AFM) on AFM.IPC-208B developed by Chongqing University. The results of XRD show...
Nanometer-sized CdS, as a typical II-VI semiconductor, has unique properties in luminescence and photocatalysis. In the experiment, nano-sized CdS embedded in PVA was prepared by coordination transformation method, and the luminescence property was determined. It could be found that the emission wavelength of the sample will be blue-shifted, and the extent of the blue-shift decreases gradually with...
The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor...
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