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Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure, working principle and fabrication process, a novel PZT-driven micropump was developed. The construction and the fabrication process are quite simple. It consists of flexible PDMS pump diaphragm, base plate and piezo-bimorph actuator. Diaphragm, meanwhile, is an active valve whose...
An amperometric biosensor based on Prussian blue (PB) modified indium tin oxide (ITO) electrode was developed. The roughness of PB film which affects the electrocatalytic properties of PB film was controlled by varying deposition voltage and time. Atomic force microscopy (AFM) was used to measure the roughness of PB films deposited under various conditions. We used capillary electrophoresis (CE) method...
Micro/nano structures on the surface of the superhydrophobic lotus leaves have been observed with scanning electron microscope (SEM) images, and the hydrophobicity enhanced by rough structures on hydrophobic surface has attracted lots of interests. This paper studied on the effects of micro-structures. From replication of lotus leaves surface by using poly-dimethylsiloxane (PDMS), micro-structures...
We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed...
Gecko has elaborate adhesive structure which allows it to move along vertical walls and ceilings quickly. There is strong evidence that the adhesion ability is due to van der Waals forces. Synthetic dry adhesive hairs inspired by gecko foot-hairs have been microfabricated by several groups. To obtain re-attachable dry adhesive hairs with mass production potential, ICP technique is employed to fabricate...
We present the successful design and fabrication of push-and-pull micro-valve and micro mixer chips that driven by a kind of nanoparticle based giant electrorheological fluid (GER fluid). Our multilayer chips are fabricated by polydimethylsiloxane (PDMS)-based soft lithography techniques. Fast response time of the GER fluid and the push-and-pull valve design adopted assure fast switching time of the...
In order to predict groove shape on laser direct-write polymer microfluidic chip, a three-dimensional transient ablation model has been developed based on heat conduction theory and energy conservation at the erosion surface. The laser is assumed continuous wave Gaussian beam. The finite element surfaces on evaporation side are non-planar and approximated by bilinear polynomial surfaces. An iterative...
In this paper, we propose a novel method to fabricate three-dimensional hexagonal-like fillister structures on lang110rang silicon wafer by precise bulk etching in micro electro mechanical systems (MEMS). Photo mask is designed as a 50 times 50 array of equilateral parallelograms having side length of 80 mum. The 40 wt% KOH solution is used as the etchant. The created structure is used as the mold...
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