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The paper presents a new design of resonant miniature electrostatic field sensors (EFS) based on surface micromachining process. With a phase and an amplitude closed loop feedback control, the sensor can be adjusted automatically to operate at its resonant frequency in despite of the temperature influence. For minimizing the capacitive feedthrough, a feedback detecting loop is utilized in the design...
In order to avoid the displacement of the AFM cantilever in surface forces measurement, a force-balanced MEMS sensor is developed. The probe of the sensor is a pendulous micromachined sensing element, which can be considered as a pair of differential capacitors. When the sensor is designed as a closed-loop system, the electrostatic force feedback can balance the surface force supplied on the sensing...
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with...
MEMS-based integrated temperature, humidity and pressure (THP) sensor has the advantages of small size, low cost, easy integration and is a highly advanced apparatus of identity, reliability and easy production. The principle and structure of the integrated THP sensor are analyzed in this paper in short, and it also provides the measuring methods and circuits in detail. The outcome of measurement...
This paper presents a novel channel fabrication technology of monolithic bulk-micromachined embedded channels. Based upon implementing two-step complementary dry etching technique and conformal parylene C layer deposition, high-aspect-ratio (internal channel height/internal channel width, greater than 20) polymer channels with uniform quasi-rectangular sidewalls have been successfully fabricated in...
Ultra-sensitive mass sensor is demanded for bio/chemical molecular detection. A piezoresistive resonant cantilever sensor with optimized is developed with an optimized electromagnetic excitation for high-mode flexure resonance. In our experiment, it has been proved that the quality factor of the resonant sensor can be improved by this optimized high-mode resonance exciting technique. Experimental...
A novel non-silicon MEMS calorimetric gas flow sensor is presented. The sensor consists of a metal sensing/heating array placed over a glass substrate and a polyimide layer for passivation. Both the anti-pressure and anti- impact performance is enhanced by using a glass solid substrate instead of a common silicon suspending structure. This merit widens the application range of micro calorimetric sensors...
This paper derives a closed form solution with fringing filed effects for the pull-in voltages of the micro fixed-fixed beam subjected to electrostatic loads and initial stress. The closed form solution is derived based on the Euler's beam theory and the energy method. The accuracy of the present closed form solution is verified through comparing with the experimentally measured data conducted in...
After successful fabrication and characterization of the first ICP based tunneling accelerometer, we modified the fabrication process to eliminate the knife-blades on the beam, which is caused by the double mask ICP process. These changes have resulted in about 20% yields enhancement at the open-loop characterization phase. The new process also enhances the height of the proof mass without increasing...
The paper presents a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media...
We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed...
The theory, design, fabrication and measurements of a novel structure for measuring the power of microwave signals are presented based on MEMS technology. The advantage of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the novel power sensor is fully compatible...
A novel microsensor combining piezoresistive and thermal resistive components is designed and fabricated. A 50mum thick silicon diaphragm (500mumtimes500mum) is used, thicker than that of the conventional piezoresistive pressure sensor, which extends the high stress distribution in the bulk silicon, and increases the operating range as well as the burst pressure. Novel meander shape piezoresistors...
Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers...
Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with...
This paper describes the application of intelligent flexible skin sensors for interfacing with robotic pets. The new flexible sensor system includes a skin sensor and a fuzzy unit. The skin sensor is fabricated using MEMS technique and can be used to measure normal and shear forces, on curved surfaces due to the flexible structure design of the sensor array. Using these features, the flexible skin...
This paper describes a micro thermal shear stress sensor with a cavity underneath, based on novel micro bumps on the silicon substrate and sacrificial layer. The micro thermal shear stress sensor has been designed and fabricated by micromachining technology. A poly-silicon strip, 4 mum times 200 mum, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element...
A thermally driven miniature electric field sensor (MEFS) has been designed, fabricated and tested. It is mainly comprised of shielding electrodes, bent beam thermal driver, positive and negative sense electrodes and drive pads etc, the shielding electrodes are driven by a cascaded bent beam thermal driver to periodically cover or expose the positive and negative sense electrodes. The thermally driven...
The mechanical properties of sol-gel-deposited lead zirconate titanate (PZT) thin films have been studied using nanoindentation method. This permitted a determination that the sol-gel derived PZT (53/47) films display an elastic modulus, approximately 123 GPa, much higher than that of bulk PZT ~ 68 GPa. The thin films exhibit hardness between 7 and 8 GPa, slightly lower than that of bulk PZT ~ 9 GPa...
In this paper, we mainly discussed a novel design of the micro UAV especially the unconventional cross coupling with four rotors between the aerodynamic design and the design of the flight control system. The vehicle has two motors rotate counter clockwise while the other two rotate clockwise to cancel the gyroscopic effects and aerodynamic torques. Besides vertical taking-off and landing capabilities,...
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