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Piezoelectric material plays an important role in the extensive applications of microelectromechanical systems (MEMS). However, its thick-film fabrication process is still not well-established along with the MEMS development. Here we develop a thick-film microfabrication process specifically for the lead-zirconate-titanate (PZT) piezoelectric material. The growth of thick PZT film is facilitated by...
We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA),...
(FePt)1-xCux alloy nanoparticles were prepared by chemical-reduction of platinum acetylacetonate, iron acetylacetonate and copper acetylacetonate with 1,2-hexadecanediol as the reducing regent. As prepared, the particles have a disordered fcc structure with an average diameter of ca. 3nm. The addition of 4 % copper promotes the effect that the disordered fcc structure transforms to ordered fct phase,...
Sn-Ag-O thin films were deposited by DC magnetron co-sputtering in a gas mixture of Ar and O2. The microstructure and morphology of the thin films were characterized by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The Sn2.3 AgO0.9 and Sn1.3AgO0.6 film films deposited at room temperature showed a mixture of crystalline and glassy structure in XRD patterns, whereas...
ZnS thin films were obtained with modified chemical bath deposition (CBD). The parameters which concern the growth and properties of the films including the concentration of the sources, pH value of the solution, the deposition temperature were optimized. A variety of complexing agents were employed, which played important roles in the formation of the thin films. The microstructure and the optical...
Conventional nanoparticles were directly synthesized in single film by PVD or CVD process. In this paper, we proposed a novel approach to the growth of SiC nano-particles (np-SiC) by thermal annealing of C/Si multilayers deposited on single crystalline Si (100) substrates using ion beam sputtering system (IBS). The deposition of C/Si multilayers was performed at room temperature under ultra high vacuum...
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