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Due to the trade secrets and intellectual property, there are still many aspects of MEMS switches which are not understand well and are currently under investigation. In this paper, our report shows that MEMS can be released using O2 and a little carbon powder at the same time. The relationship between the removing polyimide time and the cure temperature is presented using carbon powder in the quartz...
We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed...
Gecko has elaborate adhesive structure which allows it to move along vertical walls and ceilings quickly. There is strong evidence that the adhesion ability is due to van der Waals forces. Synthetic dry adhesive hairs inspired by gecko foot-hairs have been microfabricated by several groups. To obtain re-attachable dry adhesive hairs with mass production potential, ICP technique is employed to fabricate...
We present the successful design and fabrication of push-and-pull micro-valve and micro mixer chips that driven by a kind of nanoparticle based giant electrorheological fluid (GER fluid). Our multilayer chips are fabricated by polydimethylsiloxane (PDMS)-based soft lithography techniques. Fast response time of the GER fluid and the push-and-pull valve design adopted assure fast switching time of the...
In order to predict groove shape on laser direct-write polymer microfluidic chip, a three-dimensional transient ablation model has been developed based on heat conduction theory and energy conservation at the erosion surface. The laser is assumed continuous wave Gaussian beam. The finite element surfaces on evaporation side are non-planar and approximated by bilinear polynomial surfaces. An iterative...
It is well known that the morphology is one of the most important factors to affect the dielectric properties of polymeric nanocomposites. In this work, it is thought that the interfacial interaction between nanoparticles and polymer matrix is one of the most important factors affecting the crystalline morphology of the nanocomposites. So the effects of the surface-treatment of CaCO3 nanoparticle...
This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene,...
The paper proposes a novel design concept and fabrication method of micro dispensing chip. The filling process is performed by capillary force without extra energy, greatly reducing the complexity of design and operation. The annular interspaces around the nozzles in the chip can help the droplet formation on the hydrophilic surfaces, and the step conjunction between the channel and the reservoir...
In this paper, we propose a novel method to fabricate three-dimensional hexagonal-like fillister structures on lang110rang silicon wafer by precise bulk etching in micro electro mechanical systems (MEMS). Photo mask is designed as a 50 times 50 array of equilateral parallelograms having side length of 80 mum. The 40 wt% KOH solution is used as the etchant. The created structure is used as the mold...
In this paper, the multiwall carbon nanotubes were opened and then filled with Cu and Ag materials. Several kinds of carbon nanotubes/epoxy composites were prepared by melt mixing epoxy resin and the nanotubers mentioned above. The dielectric properties of the composites were investigated at room temperature. Experimental results showed that the dielectric properties of the MWNTs/epoxy composites...
This paper focuses on nano-scale analysis of mechanical properties of polymer and carbon nanotubes (CNT) embedded MEMS devices using the probe tip of the atomic force microscope (AFM). The mechanical properties of surfaces of layered materials were investigated by using nanoindentation produced with tips of an AFM. Experiment results indicated the bending characteristics of the device and could also...
We present the first single metal layer flexible microelectrode arrays designed for intraocular implantation that utilize parylene C as their primary structural and insulating material. These electrodes are fabricated as a key component of an intraocular retinal prosthesis comprising a radio-frequency coil for power and data transfer, a packaged high lead-count telemetry-recovery and driving application-specific...
This paper presents a smart immunosensing biochip using a novel electrochemical method for the portable clinical diagnostics system. The fluid flow of this device can be induced by capillary attraction force only and controlled by a geometrical structure. By this fluid transport mechanism, it does not require external electrical power or control circuit parts. Therefore it is suitable for disposable...
The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional poly silicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase...
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