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Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed,...
Transition metal dichalcogenides MS2 (M = Mo, W, Nb, Ta) have the lamellar structures similar to graphite. They are often used as solid lubricants in high/low temperature, high load, vacuum, in which oil lubrication is failed. We have synthesized WS2 nanotubes with decomposition method using Al2O3 template. Moreover, chemical vapor transportation reaction is used to produce NbS2 nanotubes in evacuated...
Functionalized quantum dots have been successfully attached to multi-walled carbon nanotubes over carbodiimide-assisted coupling. Characterization in a transmission electron microscope shows the quantum dots are attached mainly at the opened tips and defect sites on the side-walls of nanotubes, suggesting the covalent nature of the bonding and high selectivity to chemically reactive sites. Due to...
As the rapid growing of a wide variety of research and development activities on nanotechnology, ultra-high precision nanopositioners are greatly required for nano scale manipulation. In this paper, the design issues of a compliant parallel micromanipulator (CPM) for nanomanipulation is presented from the mechanical design point of view. A CPM is an integration of parallel and compliant mechanisms,...
Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic...
By introducing a broken geometric symmetry in a semiconductor nanochannel, we have realized an array of planar nano-diodes, called a self-switching device (SSD), using only one nanolithography step. Not only being much simpler than conventional diodes which generally require a multi-layer architecture and multi-step lithography, the SSD also possesses a very high operational speed because of the simplicity...
Most of the biosensors are based on the enzymatic electrochemical analysis and are disposable due to the use of the enzymes that are living creatures. Thus, these are limited to the in-vivo and handheld continuous monitoring sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable electrochemical sensors without using...
In recent years, high resolution metrology up to nano-scale has attracted substantial attention due to the increasing need of ultra precision measurement systems for MEMS and NEMS calibration. In this paper, an analytical and numerical investigation for the proposed design of a 6-degree-of-freedom (6-dof) universal ultra precision metrology system using relatively simple and inexpensive but highly...
In recent years, interest in the thermal-hydraulics at micro/nano scale keeps increasingly growing owning to the rapid technology thus enabled. It was now accepted that the classical thermal or fluidic theories working well for "macro bulk systems" may become invalid for micro/nano scale geometry. On the contrary, some phenomena seldom occur in the large scale may frequently happen as a...
Based on innovative nano-optical structures and design, an embedded metal-wire nanograting was fabricated for using as a broadband polarizer or polarizing beam splitter to reflect TE-polarized light and transmit TM-polarized light, and AR coating was designed in order to achieve best efficiency for both polarizations. An upper-cladding layer of the same material as the gratings is deposited on the...
In order to understand the formation mechanism of nano- materials during the arc discharge in liquid, serial experiments were conducted on synthesis of nano-materials by arc discharge both in water and in liquid nitrogen. Previous research showed that the stability of arc discharge affected the nano-products significantly. In this paper, the cross magnetic field (CMF) was introduced to disturb the...
A method to fabricate optical fiber probe nanotips by combination of heated micropulling and static chemical etching has been developed. Firstly, electric arc heating and micropulling process is used to change the configuration of fiber cladding, thus to obtain semi-finished fiber probes with desirable shape. Then the dimension of probe tip is further reduced by hydrofluoric (HF) acid static chemical...
Nanojet means that the liquid is forced to pass through the nozzle with the nanosize diameter, we report here that nanojet was formed for the first time in lab by heating the PbO coated Pb clusters. In this experiment, the coated clusters are heated to more than 200 C and it was found that the inner Pb core melted and ran out from the cracked outer shell with a 200-nm-long(as long) trail. The in situ...
In recent years, carbon nanotubes (CNTs) attract intense research duo to their novel mechanical and electronic properties and their tremendous potential for future technological applications. In this paper, a CVD synthesis method of well aligned multi-walled carbon nanotubes using iron(II) phthalocyanine as raw material and catalyst was introduced, then the fabrication of carbon nanotubes thin sheets...
The nano manipulation needs miniaturized microtools for minute adjustment or in situ mechanical characterization. This paper demonstrates the feasibility of using bulk silicon electro-thermal expansion micro actuator to drive a lever nano motion platform. The feasibility study includes specimen preparation and dynamic and static characteristic testing. The specimen is made up of a micro electro-thermal...
This paper presents an integrated MEMS nanocalorimeter with nanowatt thermal power sensitivity and on-chip control of calorimetric chamber temperatures for measuring structural transitions of biomolecules in solution. The device features two identical polymeric freestanding membranes, resistive temperature sensors and heaters, and a low-noise thermopile differential temperature sensor between the...
The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.
With the rapid progress of ultra short laser technology, two photon photopolymerization(TTP) has been introduced into the domain of microfabrication. Its characterization and process are described in this paper as well as its experimental system. Through the relevant experiments, we optimized the spatial resolution of this method. Under the fine focusing, we obtain the minimum line width of 0.65 mum,...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
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