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Nanoscale tweezers are integrated to deep reactive ion etching (DRIE)-processed microelectrodes by localized chemical vapor deposition using focused ion beam (FIB-CVD). The MEMS electrodes for electrostatic actuation of nano tweezers are fabricated on a heavily doped SOI wafer, which works as the interconnecting platform to control nanoscale device from macro-world. Unlike the carbon nano tube (CNT)-based...
Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction...
Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current...
We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA),...
The paper describes an approach for preparing probes for combined SPM techniques, such as scanning electrochemical microscopy (SECM)/photoelectrochemical microscopy (PEM), SECM/near-field scanning optical microscopy (NSOM). The SECM/PEM probes were constructed firstly by stripping off a single mode optical fiber's polymer coating (125 mum diameter of cladding) at one end. The stripped optical fibers...
Regular electrical impedance tomography (EIT) is based on the surface electrodes which results in long application times, long stabilization times, and high ESEI. Clinically relevant information in electrical impedance tomography is diluted by the electrical properties of stratum corneum. Eliminating stratum corneum would improve the signals from the tissue. In this paper, a new concept and possible...
This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene,...
A fabrication technology of microelectrode with nano radius of its tip was presented in electrochemical micromachining (EMM). The mechanism of pulses EMM was expatriated firstly. The shaping principle of microelectrode and micro probe was analyzed. Based on the fundamental experimental behavior of EMM current, a control strategy of current density was proposed with the gap variance. Then an experimental...
Electrowetting-on-dielectric (EWOD) is a promising method for manipulating tiny amounts of liquids. However, the miniaturization and the monolithic integration become the great challenges to improve the EWOD applications in actual lab-on-a-chip systems. In this paper, we present an IC-compatible digital microfluidic actuator, which uses silicon as the substrate and the thermally grown SiO2 film on...
We present the first single metal layer flexible microelectrode arrays designed for intraocular implantation that utilize parylene C as their primary structural and insulating material. These electrodes are fabricated as a key component of an intraocular retinal prosthesis comprising a radio-frequency coil for power and data transfer, a packaged high lead-count telemetry-recovery and driving application-specific...
A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified...
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