The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide...
Relative humidity sensing is crucial in many applications. However, hysteresis, lack of stability and low accuracy still exist in some of the available humidity sensors. This paper studies the effect of changing the supported beams' length and width on the resonance frequency and mass sensitivity of a CMOS-MEMS resonator proposed for relative humidity sensing applications. The resonator is designed...
CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The...
This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall sensor performance. Noise is observed in various active and passive devices affecting circuit performances...
This paper presents design, simulation and study of different noise minimization techniques that should be used in chopper stabilization circuits for CMOS-MEMS sensor readout interface circuit applications. Chopper stabilization technique is widely used in CMOS-MEMS sensors, as it is effective in tackling low frequency noises including the most dominant, flicker noise (1/f). In CMOS-MEMS sensors where...
A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the characterization of polysilicon piezoresistors, heater and temperature sensor embedded in the device. The measured...
This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitudinal and transverse. CMOS polysilicon thin film is used as the piezoresistive sensing material. The...
In utilizing CMOS-MEMS resonators as mass-sensitive platforms, a uniform temperature distribution on the membrane surface is critical. In this paper, a novel design of CMOS-MEMS resonator with embedded microheater to control the temperature over the sensing layer was successfully designed and characterized. The CMOS-MEMS resonator was fabricated using 0.35 µm CMOS and post-CMOS micromachining process...
In this work, we propose a PMOS based wide swing cascode current mirror (WSSCM) for 0.35 um CMOS-MEMS technology. The proposed circuit shows a high bandwidth current mirror with high output resistance capability operating at low voltage levels. Noise, output resistance and bandwidth analysis are presented. CADENCE SPECTRE circuit design tool using MIMOS 0.35 um and BSIM3 transistor models is used...
This paper presents a design and technique for low noise, low offset modulation demodulation circuit for chopper stabilized amplifiers use in CMOS-MEMS sensor applications. In these sensors, where the sensed signals are usually very weak, a low-noise interface readout circuit plays a crucial role in determining the overall sensor performance and success in the market. Amplifiers are the core building...
CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 µm long and 340 µm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency,...
This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator...
Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macro (mm) scale. The dimensions of the cantilever are 33mm, 10mm, and 0.5mm for length, width, and thickness,...
Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presents the detail fabrication processes of the electrostatic energy harvester components, i.e. the Trapezoidal...
With the fast development in the ubiquitous computing and wireless sensing technologies, a new era of smart cities is evolving. Future smart cities will gather sensory data, needed for effective management of the city, using wireless sensor networks. Exhaustive power sources such as batteries need periodic replacement and hence increase the cost of ownership of wireless sensor network. On the other...
Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their adaption. To overcome these issues, a CMOS MEMS micro-cantilever has been proposed for capnometric...
A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude...
Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are generated to achieve estimates of the device performance and to check the validity of the subsequent simulation. CoventorWare simulation software is used to design and process the micromachined microcantilever gas...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.