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A CMOS–MEMS device for mass detection has been designed using 2008 CoventorWare software and fabricated using 0.35µm CMOS technology. This paper reports the characterization of the microheater and the temperature sensor embedded in the device. The measured resistances of the microheater and the temperature sensor were found to be close to the modeled values within ~4.2% error. The average temperature...
CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The...
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