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Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide...
Relative humidity sensing is crucial in many applications. However, hysteresis, lack of stability and low accuracy still exist in some of the available humidity sensors. This paper studies the effect of changing the supported beams' length and width on the resonance frequency and mass sensitivity of a CMOS-MEMS resonator proposed for relative humidity sensing applications. The resonator is designed...
This paper presents a reliable solution for power supply by using thermal energy harvesting by means of the micro thermoelectric generator (TEG). The construction of thermocouple in achieving maximum power output is investigated which include the width and length of the thermoelements for a fixed value of the thickness of thermoelements. For the structure design, several TEGs configuration is tested...
CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The...
This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall sensor performance. Noise is observed in various active and passive devices affecting circuit performances...
This paper presents design, simulation and study of different noise minimization techniques that should be used in chopper stabilization circuits for CMOS-MEMS sensor readout interface circuit applications. Chopper stabilization technique is widely used in CMOS-MEMS sensors, as it is effective in tackling low frequency noises including the most dominant, flicker noise (1/f). In CMOS-MEMS sensors where...
This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that result in achievement of larger temperature difference between two junctions. First, a thicker dielectric...
A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the characterization of polysilicon piezoresistors, heater and temperature sensor embedded in the device. The measured...
This paper presents the design, modeling, and simulation of a multiple resonant MEMS vibration energy harvester (VEH) suitable for wireless sensor network (WSN) applications. Since ambient vibration has a frequency of 100 Hz and below, a multiple resonant harvester will be an advantage to increase the vibration frequency and hence the output voltage produced by the device. The high frequency harvester...
This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitudinal and transverse. CMOS polysilicon thin film is used as the piezoresistive sensing material. The...
In utilizing CMOS-MEMS resonators as mass-sensitive platforms, a uniform temperature distribution on the membrane surface is critical. In this paper, a novel design of CMOS-MEMS resonator with embedded microheater to control the temperature over the sensing layer was successfully designed and characterized. The CMOS-MEMS resonator was fabricated using 0.35 µm CMOS and post-CMOS micromachining process...
In this work, we propose a PMOS based wide swing cascode current mirror (WSSCM) for 0.35 um CMOS-MEMS technology. The proposed circuit shows a high bandwidth current mirror with high output resistance capability operating at low voltage levels. Noise, output resistance and bandwidth analysis are presented. CADENCE SPECTRE circuit design tool using MIMOS 0.35 um and BSIM3 transistor models is used...
In this paper, a single fault (short or open) on a single sided printed circuit board (PCB) interconnect was experimented. The induced magnetic fields of faulty and fault free interconnects were detected by a planar array-coil sensor using eddy current testing (ECT) principle. The experimental results have shown that in the presence of a short fault, the differences between the induced voltages from...
This paper presents a design and technique for low noise, low offset modulation demodulation circuit for chopper stabilized amplifiers use in CMOS-MEMS sensor applications. In these sensors, where the sensed signals are usually very weak, a low-noise interface readout circuit plays a crucial role in determining the overall sensor performance and success in the market. Amplifiers are the core building...
CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 µm long and 340 µm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency,...
This paper presents the design of complementary metal-oxide-semiconductor (CMOS) based thermal energy generator (TEG). Energy harvesting techniques have been employed as to extend the lifespan of various battery-operated applications for many years. Among numerous techniques available, thermal energy harvesting has proven to be a widespread practice in harvesting electrical energy as heat can be found...
This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator...
In this paper, theoretical and experimental study on cylindrical dielectric resonator antenna (CDRA) made of CCTO material is reported. The CDRA with high dielectric constant (εΓ = 55) is fed with aperture coupled 50 ς microstrip transmission line. The TE011+S mode of CDRA is excited to operate at 5.15–5.35 GHz for wireless local area network (WLAN) application. The electrical model of the aperture...
In this paper, electrical models of single element cylindrical dielectric resonator antenna (CDRA) and two element CDRA array made of Calcium Copper Titanium Oxide (CCTO) material are presented. The 50 δ microstrip transmission line is used to excite the CDRAs through coupling slots etched on the ground plane. The electric models of single element CDRA and two element CDRA array are designed by using...
Piezoelectric cantilevers have found a wide usage in sensor technologies for mass sensing and energy harvesting. This paper reports theoretical calculations, Finite Element Method (FEM) simulation and experimental measurements of mass detection using piezoelectric bimorph cantilever (PZT-5H) in macro (mm) scale. The dimensions of the cantilever are 33mm, 10mm, and 0.5mm for length, width, and thickness,...
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