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Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide...
Relative humidity sensing is crucial in many applications. However, hysteresis, lack of stability and low accuracy still exist in some of the available humidity sensors. This paper studies the effect of changing the supported beams' length and width on the resonance frequency and mass sensitivity of a CMOS-MEMS resonator proposed for relative humidity sensing applications. The resonator is designed...
CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The...
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