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A simulation analysis of a porous nanocrystalline silicon membrane (pnc-Si) is conducted to investigate the mechanical properties of the membrane in an assumed environment of an artificial kidney, with an applied pressure ranging from 10–500 mmHg. The simulation was done using COMSOL Multiphysics 5.1 under stationary study with the membrane having a variation of surface area. From simulation, the...
This paper describes an octopus bioinspired vacuum gripper for transportation or assembly of industrial parts. The previous gripper can grasp the object with flat, curvature, uneven, and grooved surface. However, octopus has the microstructure on suction cup, for example, cylindrical and radial grooves and micro bump. These structure is expected to improved flexibility and adhesive force of suction...
The desert locust (schistocerca gregaria) has ears integrating sound reception, impedance transformation and frequency discrimination in a single passive membrane. The anatomy and frequency dependent response of these ears to acoustic input have been extensively studied before. This is the inspiration for the development of a new acoustic sensor with integrated mechanical filtering. We have worked...
This paper reports a single-step and cost-effective method to fabricate ultrathin Poly(dimethylsiloxane) (PDMS) membrane with honeycomb-like nanostructure on silicon substrate. The method is based on the template prepared by colloidal nanoparticles self-assembly. The thickness and nanostructure of the membrane are both determined by the size and surface morphology of two dimensional colloidal nanoparticles...
MEMS are typically defined as the devices or systems which are integrated with electrical and mechanical components on a silicon substrate through the microfabrication techniques. Due to its low cost, small size, low power consumption with high efficiency, MEMS technology has been widely used in many fields. In this paper, the design and simulation of a magnetic micropump with tri-membrane fully differential...
This paper reports on the design and fabrication of a neural probe for simultaneous recording of neural activity and localized drug delivery. In comparison to common microfluidic probes, additional electrodes facing the fluidic channel are integrated in the polyimide-based membrane covering the microchannels. The novel fabrication process applies two-sided deep reactive ion etching (DRIE) of silicon...
This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal...
Cracks patterned lithographically into the buried oxide (BOX) layer of silicon-on-insulator wafers were found to substantially improve yield in the release of ultrasoft silicon cantilevers. The BOX layer is useful as an etch stop and sacrificial layer in microfabrication. However, compressive stress in the BOX membrane can cause it to buckle and crack when released. These cracks can damage delicate...
In this paper, we present latest results of a thermo-pneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages...
Through Silicon Via (TSV) is a very attractive solution for 3D stacking. One of the main concerns regarding the TSV technologies is the resulting stress build up inside the silicon substrate that induces warpage or expansion at the wafer level, crystalline defects in the neighboring silicon of the TSV and finally can impact performances and reliability of CMOS device as well. In this work, we show...
This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was...
A wearable Flexible Blast Monitor to detect, record and display the peak shock experienced by personnel exposed to high energy explosions can help in early detection of possible traumatic brain injury (TBI). Sensors fabricated on flexible substrates allow for the systems to be mounted on non planar surfaces overcoming the limitations of rigid sensors. The design detailed here uses a contact mode measurement...
Due to the recent advances in the microsystems field a new group of applications based in wireless applications have arisen. In order to provide these devices with the working autonomy that they need, micro direct methanol fuel cells emerge as a suitable solution because of the high energy density of the used fuel. The main challenge regarding micro fabrication technology is the fabrication of the...
Vertical arrays of high aspect ratio (>100) InSb nanowires with diameters of ~20 nm have been fabricated using a Porous Anodic Alumina (PAA) template that is supported on a Si substrate with a thin layer of titanium (Ti) sandwiched between them. The process described here uses a reverse anodization technique to penetrate the hemispherical pore bottom barrier oxide layer prior to the electrodeposition...
Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation...
The present paper is devoted to the description of a fabrication process of thick (tens of micrometers) insulating SiO2 membrane embedded in a c-Si substrate. The membrane processing consists of total thermal oxidation of trenches, which were preliminary etched on front side of the substrate, conformal deposition of dielectric layer for SiO2 trenches closing and selective etching of c-Si from back...
This paper presents a hybrid silicon etching processing technique for removing the entire bulk silicon to release microstructure. The proposed method that combines a back-side wet anisotropic pre-etching and a front-side XeF2 dry isotropic post-etching differs from previous works in silicon micromachining. Wet anisotropic pre-etching enhances the low-cost of the proposed method while the XeF2 dry...
This paper presents a poly(dimethylsiloxane) (PDMS) micropump with a simple planar design that incorporates check valves and a pumping chamber into one single layer, allowing for reliable operation and easy system integration. This micropump mainly consists of a pneumatically driven thin membrane, and a pumping chamber sandwiched between two in-plane check valves. The novelty of the micropump lies...
The mechanism of compressive stress in silicon nitride membrane is studied in this paper. The effects of the various process parameters on the compressive stress in silicon nitride are analyzed and discussed on the basis of the current method using PECVD equipment. The high compressive stress silicon nitride membrane has been fabricated on the optimization of the process parameters, and the compressive...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process...
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