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A simulation analysis of a porous nanocrystalline silicon membrane (pnc-Si) is conducted to investigate the mechanical properties of the membrane in an assumed environment of an artificial kidney, with an applied pressure ranging from 10–500 mmHg. The simulation was done using COMSOL Multiphysics 5.1 under stationary study with the membrane having a variation of surface area. From simulation, the...
A simple and easy method to estimate either compressive or tensile thin film stress that exists within the buckled MEMS bridge structure is presented. An array of tantalum MEMS bridge with buckle profile is fabricated at length 570 μm–1620 μm. The distance between the maximum vertical deflection of the fabricated buckled tantalum bridge to the substrate is measured. The analytical pull-in voltage...
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