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Embedded Wafer Level Package (eWLP) is designed and developed. The eWLP consists of one silicon die encapsulated with a mold compound and its size is 12mm × 12mm × 0.2mm. The assembly process of eWLP consists of reconfiguration of the dies on an adhesive tape, followed by molding, thinning and rerouting distribution layer (RDL) process. Finite Element Modeling (FEM) is used to understand the stress...
Main objective of this study is to design and development of multi-die embedded micro wafer level packages (EMWLP) reliability test vehicles. Such as, the laterally placed die EMWLP and the vertically stacked thin die EMWLP. For reliability evaluation, EMWLPs have been subjected to both environmental and mechanical reliability tests as per JEDEC standards. These reliability tests include highly accelerated...
In semiconductor, the reliability of interconnects is assessed through electromigration (EM) on specially-designed metal line and via test structures. There are different types of test structures and methodologies for qualification and process monitoring purposes. Packaged level constant current EM (PLR EM) test is a widely accepted method for technology qualification. Wafer level accelerated tests...
Wafer level bonding is widely applied in the manufacture of sensors, actuators and CMOS MEMS. Bonding technology includes direct bonding, anodic bonding, eutectic bonding, adhesive bonding and glass frit bonding. Glass frit bonding has pattern-able, excellent sealing performances, high bonding strength, don't need apply any voltage during bonding process and less CTE mismatch compared to glass and...
Wafer level reliability (WLR) issues of DRAM cell and peripheral transistors are discussed. Since the 70 nm technology node, recessed transistors have been accepted for assuring data retention time of DRAM cell transistors. Various recessed transistor structures suggest that the most important issue in reliability, in addition to optimizing data retention time, is the elimination of local regions...
The main objective of this study is to validate the thermomechanical properties of materials used in some electronic components. The improved performance of HgCdTe infrared focal plane arrays requires reliability of the assembly at low temperatures down to 77K. Unfortunately, the thermomechanical behavior of most materials of these components remains to be clarified, particularly in a cryogenic environment...
With the advance of high-performance and small-size microelectromechanical systems (MEMS) devices, wafer-level packaging has gained increased attention over the past few years. Most MEMS packages must protect the often-fragile mechanical structures against the environment and provide the interface for the interaction with the next level in the packaging hierarchy. It is obvious that stable performance...
Wafer level accelerated testing is a key tool to perform fast reliability assessment of new technologies. This paper presents an innovative methodology developed to perform accurate life-time extrapolation of 3-dimensional (3D) high density capacitors through constant electric field stress (CES) test. This methodology is first based on dielectric thickness extraction from planar capacitor measurements...
In this paper, we report a novel plating-friendly polishing mechanism for fabrication of high coplanarity and high density lead-free copper pillar bumps for advanced packaging applications. The final experimental results showed that the UIW (Uniformity in Wafer) could be sharply decreased from 6.37% after plating to 1.7% after polishing and even to 1.7% after reflow throughout the entire 4 inch wafer.
The demand for wafer level packages (WLP) has increased significantly due to its smaller package size and lower cost. However, board level reliability of WLP is still a major concern. This study investigates the board level temperature cycle reliability of three very different wafer level package configurations. Comprehensive studies are carried out through temperature cycle test, failure analysis,...
In this study, wafer level NCA patterning processes for CIS modules have been demonstrated and the effects of whole processes on NCAs were also investigated. At first, NCA solution was directly coated on a bumped wafer with Cu passivation on an image sensing area. Cu was sputtered on a NCA coated wafer, and then sputtered Cu layer was patterned using a photoresist lithography method. Subsequent NCA...
This paper presents the development of wafer level embedding process for a three dimensional (3D) embedded micro wafer level package (EMWLP). Wafer level embedding process was carried out by using compression molding machine and low-cost granular epoxy molding compound (EMC). Various molding process parameters such as molding time and temperature and three EMCs of different CTEs were analyzed to achieve...
This paper will describe a new technique to increase the reliability of wafer-level packages (WLPs). The technique enables the placement of a protective coating around the solder balls using a maskless process and provides improved reliability performance as compared to unprotected devices. In addition, the unbonded devices allow for easier handling. This approach also minimizes form factor requirements...
The needs of ambient intelligence and miniaturization of electronics require extensive integration of semiconductor components such as MEMS and sensor packages. A MEMS/sensor package needs access to environment, which is a challenge for MEMS or sensor encapsulation. Film assisted molding (FAM) technology can meet the demand of the functional area opening in the encapsulation. FAM technology can fulfill...
For advanced wafer-level chip scale packages (WLCSP), board level solder joint reliability is a major concern, and typical stress-relieving methods such as capillary underfills and molding compounds are costly. One method of low cost reliability improvement for WLCSPs is the use of a wafer level SolderBracetrade coating, which delivers improved reliability with minimal material and capital cost. In...
Copper/Low-k structures are the desired choice for advanced integrated circuits (ICs) as the IC technology trends moving toward finer pitch, higher speed, increased integration and higher performance ICs. Copper interconnects with low-k dielectric material improves the ICs performance by reducing interconnect RC delay, cross talk between adjacent metal lines and power loss. However, low-k materials...
The technique of wafer level chip scale package (WLCSP) is similar as flip chip packages without using underfill. The weakest point is solder joint reliability issue so the package size of WLCSP in current industry is used less than 10times10 mm2. In this paper, we use 5.5times5.5 mm2 package size to take as test vehicle and focus on ball peeling and shear stresses to assume and simulate drop test...
Most important technology for developing of wafer level packaging is studied in this paper. That is the process of drilling the via hole that are needed filling of conductive material for electrical connection or non-conductive material for reliability. Several kinds of drilling and filling methods of via holes for the interconnection were studied. The via formation for interconnection is based on...
Screening latent defects in a wafer test process is very important task in both reducing memory manufacturing cost and enhancing the reliability of emerging package products such as SIP, MCP, and WSP. In terms of the package assembly cost, these package products are required to adopt the KGD (known good die) quality level. However, the KGD requires a long burn-in time, added testing time, and high...
To increase miniaturization, CSWLP (chip size wafer level packaging) has been developed. However, the difficulty to get good solder joint reliability leads to manufacture only small CSWLP modules. Different underfill methods are evaluated here, by measurements and simulations: results prove that underfill is necessary, but a bad choice can also decrease the reliability. An original method called ldquore-enforcementrdquo...
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