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Tactile metrology with high-aspect-ratio micro holes was addressed using extremely slender piezoresistive micro cantilever sensors operated under axial loading. Linear strain-displacement characteristics were observed at small axial displacements. From noise and non-linearity measurements the resolution and uncertainty of the cantilever sensors were determined to ap 1 nm and < 10 nm, respectively,...
In this work, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air- gap structure and parallel stacked inductor have been fabricated with 0.18 mum CMOS compatible process. In the design the electromagnetic solver, SONNET, and the finite element program, ANSYS, were used for electrical-characteristics and maximum mechanical strength, respectively. Experimental results show...
Electrostatic micro generators based on variable capacitors driven by proof mass motion constitute an important class of motion energy harvesters. We present an analytical approach for calculation of the variable capacitance in non-trivial harvester structures where fringing fields can not be neglected. We restrict attention to transducers consisting of metal strip electrodes on opposing dielectrics,...
This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane.
The behaviour of blood flow in relation to microchannel surface roughness has been investigated. Special attention was focused on the techniques used to fabricate the microchannels and on the apparent viscosity of the blood as it flowed through these microchannels. For the experimental comparison of smooth and rough surface channels, each channel was designed to be 10 mm long and rectangular in cross-section...
This paper presents a novel and precision process to fabricate an array of micro metal vertical probes with various tip angles. The process includes an inclined and multiple ultraviolet (UV) lithography, contact lithography and Ni electroforming technology. The tips of micro pyramid vertical probe array utilize the inclined and multiple exposures cooperated with Snell's law. Due to the light pass...
The manipulation and discrimination of biological cells is essential to many biomedical applications. Insulator-based dielectrophoresis (iDEP) trapping consists of insulating structures which squeeze the electric field in a conductive solution to create a non-uniform electric field. The pattern of insulating structure was designed to generate the region of high-electric field to trap cells with positive...
The mechanical fatigue behavior of gold components for MEMS applications is analyzed; an experimental procedure to measure the lifetime of components under alternate loads with different mean stress conditions is presented. Dedicated devices were designed and built able to produce alternate loading on the embedded specimens; the electrostatic actuation is used as driving force. Gold microbeams are...
In this paper, the effect of material and dimensional uncertainties on performance of electrothermal microactuator is investigated. A simple and efficient uncertainty analysis method is used based on direct linearization method; also uncertainty analysis is performed by creating second-order metamodel through Box-Behnken design and Monte Carlo simulation. The results demonstrate how these uncertainties...
In this paper, the design, fabrication and initial characterization results of a bidirectional, vibration powered, bulk silicon-based electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration. Its mechanical design is inspired from 2D gyroscope. In most of real systems, the axis of the external vibrations is not known and if we assume that the...
We will review the initial design and development of a first-of-its-kind latching micro optical switch that can be switched from one optical state to another utilizing thermal actuation. The device is designed to remain in one position or the other without the requirement for continuous external power to keep the switch in either state. The switch uses deep reactive ion etching to form the necessary...
Dynamic behavior of oscillating perforated gold plates under the effect of squeeze film damping is analyzed by means of experimental measurements and a compact model. Thin plates built with the surface micro-machining technique and gold electroplating were designed with many different geometrical dimensions for the plate and the holes; the number of holes is also variable. Altogether, samples with...
This paper makes a case for design-for-testability (DFT) for microfluidic biochips, and presents a DFT method that incorporates a test plan into the fluidic operations of a target bioassay protocol. By using the testability-aware bioassay protocol as an input to the biochip design tool, the proposed DFT method ensures a high level of testability, defined as the percentage of the electrodes or functional...
3D integration of micro electromechanical systems (MEMS) is expected to reduce the foot print of existing MEMS products and enable production of miniaturized sensor nodes on a large scale. However, 3D integration of MEMS is in general different from 3D integration of planar integrated circuits (ICs) due to additional mechanical requirements. Specifications regarding properties like stiffness, volume,...
An advanced sensor node for direct tire pressure monitoring is presented, where the shock-sensitive crystal is replaced by a bulk acoustic wave (BAW) based resonator. Since the applied components are arranged in a 3D integrated stack, a wide range of new design issues arise. This paper investigates system issues due to temperature gradients in a 3D stack as well as the radio frequency (RF) characteristics...
A load cell is a transducer to convert a force into an electrical signal. Compared with widely used strain gauge type load cells, silicon-based capacitive load cell cell can offer advantages such as uniform performance over material property change and stable mechanical property in harsh conditions. Here we present a capacitive type load cell with a load sensitive silicon structure and efficient fabrication...
Due to high integration density the influence of manufacturing technologies on the system behavior has to be considered in the design process of 3D systems. Therefore, information from different physical domains has to be provided to designers. The variety of structures and physical effects requires efficient modeling approaches and simulation algorithms. In the following a modular approach which...
Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for...
The detailed evaluation of a PCB-based microfluidic sensor directly integrated on a polymeric microchannel is presented in this work. The sensor consists mainly of polymeric materials, therefore the operational characteristics are enhanced due to the high level of thermal isolation. The maximum measurement range was 0-400 mul/min which occurs in hot-wire operation, while under the calorimetric operating...
This paper presents an original multi-sensor system for 3D orientation determination based on only 4 MEMS sensors. MEMS sensors are manufactured on a cheap standard technology from NXP Semiconductors using TMAH front side wet etching with no additional masking step. This very low cost manufacturing process makes the system suitable for various consumer applications. Electronic architecture for signal...
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