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This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane.
We will review the initial design and development of a first-of-its-kind latching micro optical switch that can be switched from one optical state to another utilizing thermal actuation. The device is designed to remain in one position or the other without the requirement for continuous external power to keep the switch in either state. The switch uses deep reactive ion etching to form the necessary...
The paper describes the design of multiple RF MEMS front-end components that could replace off-chip units in future transceivers. The components can effectively be combined and co-fabricated with CMOS circuitry. A CMOS-MEMS approach is used, which means that the microelectromechanical parts are made by multi-layer structures in a standard CMOS process. The ASIMPS procedure offered by CMP uses the...
We report a new method of fabricating thermal bimorph actuators utilizing high permittivity ferroelectric thin films. This device is the first known thermal cantilever actuator employing barium titanate (BaTiO3) for RF applications. Compared to electrostatic actuators, this MEMS structure is designed to handle high RF transmitted power while maintaining a high capacitance ratio due to the high permittivity...
We present a bidirectional electrothermal microgripper for the advanced manipulation of single large cells. The device demonstrates excellent performance, and shows great potential as a supporting microtool for different biomedical procedures such as oocyte selection or electrofusion of cells. In particular, we focus on the operation of the device in real environments, i.e. integrated in a standard...
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