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We will review the initial design and development of a first-of-its-kind latching micro optical switch that can be switched from one optical state to another utilizing thermal actuation. The device is designed to remain in one position or the other without the requirement for continuous external power to keep the switch in either state. The switch uses deep reactive ion etching to form the necessary...
New designs for a 1 times 4 and a 1 times 8 CWDM multiplexers based on cascaded groups of series coupled ring resonators are presented. Compared to other integrated optical alternatives such as MMI phasars, cascaded Mach-Zehnder interferometers and cascaded AWG, the proposed circuits offer superior performance in their very sharp roll-off factor that exceeds 0.75, their reduced crosstalk level that...
This study applies a novel fabrication process of molding stamper that combines anisotropic wet etching of silicon-on-insulator (SOI) wafers with electroforming to produce precision stampers. Micron-size features, such as trapezoidal grooves and prisms, can be accurately fabricated and distributed. Because the feature geometry and the distribution can be accurately realized using the proposed scheme,...
This paper present results of work undertaken for exploring MEMS capabilities to fabricate AC voltage references for electrical metrology and high precision instrumentation through the mechanical-electrical coupling in MEMS devices. Several first devices have been designed and fabricated using a Silicon On Insulator (SOI) Surface Micromachining process. The measured MEMS AC voltage reference values...
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