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We propose a noisy-channel model for a capacitively-coupled personal-area network (PAN) with megahertz-frequency signals. The model describes the influence of power lines connected to transceivers. We analyzed the signal-to-noise ratio (SNR) for the PAN channel. It is derived from the model that the SNR can be enhanced by using a common-mode choke. We also found conditions for enhancing the SNR. The...
This paper describes an RF-MEMS switch structure and its fabrication process for developing low-loss multiport RF switches that integrate multiple RF MEMS switches and CMOS control circuits. In our structure, RF MEMS switches and coplanar waveguides are seamlessly integrated, and they are suspended above a CMOS LSI to reduce the loss due to the lossy Si substrate. A gold multilayer stacking technique...
Nano-watt-power circuit techniques that accumulate energy from nanoampere-level currents and continuously sense vibration are used for dust-sized batteryless sensor nodes. A chip is fabricated using a 0.35 ??m CMOS process. The vibration is sensed with 0.7 nW and the energy is accumulated from a 1 nA current source with voltage monitoring.
This paper presents experimental proof of energy harvesting with MEMS-based vibrational devices. To clarify the effect of the coupling of vibration of MEMS devices and electrical field of electrets for current generation, a slit-and-slider structure was developed. This structure enables to combine the MEMS devices and electrets after their vibrational and electrical properties have been characterized...
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semi-conductor-microelectromechanical systems (CMOS- MEMS). The prospect of this integration is also presented. A MEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion, it is confirmed that...
A fingerprint sensor that integrates fraud detection and fingerprint sensing to prevent spoofing with a fake (artificial) finger is presented. Fingerprint identification using capacitive fingerprint sensing provides small user-authentication systems. For systems that need a higher level of security, fraud detection, which determines whether the sensed finger is alive or not, is necessary. Integrating...
This paper describes an integrated MEMS LC resonator that consists of a MEMS inductor and varactor. The resonator features a sealed air-suspended structure: the inductor and varactor are suspended above a CMOS LSI to improve their performance, and they are sealed with a film to protect them during packaging. The quality factor of the inductor is four times higher than that of a CMOS top-layer-metal...
The authors performed a scratch test in which a weighted needle applies scratch stress to the surface of a capacitive fingerprint sensor large scale integration (LSI), which has a grounded wall (GND wall) structure where each sensor plate is surrounded by a lattice-like wall. The scratch stress degrades not only the sensor's surface but also the metal interlayer. Increasing the thickness of the surface...
This paper describes a novel RF CMOS-MEMS switch that integrates RF MEMS switches and CMOS control circuits. A single-pole 8-through RF CMOS-MEMS switch was fabricated and its operation at 3.3 V supply voltage was achieved. The switch was encapsulated with a thin film at wafer level to prevent destruction during packaging. Experimental results confirm that the switch has mechanical reliability for...
We evaluated the electrostatic discharge (ESD) hardness for some kinds of capacitive fingerprint sensor LSIs. In contact discharge tests, our sensor with the GND wall structure and another sensor with a GND demonstrated of ESD failure voltage above plusmn8 kV. On the other hand, in air discharge tests, ESD tolerance of our GND wall structure was over plusmn 20 kV, whereas that of the other GND structure...
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