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A power switching system combining a MEMS (Microelectromechanical systems) switch and an arc suppression circuit has been developed. The system, using a single 3mm × 3mm MEMS switch die coupled with protection electronics, has been demonstrated to switch both resistive loads and inductive loads to a peak power of around 800W. The entire opening and closing operations are completed in a few microseconds,...
We introduce a flat micro energy harvester with a volume of 0.9 cm3 and a height of 3 mm. The combination of multiple magnetic circuits enhancing each others flux and one serpentine coil with a single winding and an effective copper filling factor of 100 % enables to maximize the output power. With a first prototype an average power of 12 µWavg at 1 ms−2 was generated. Our approach evidences that...
This work presents the methodology to synthesize single-walled carbon nanotubes and place them directly on paper utilizing a micro chemical vapor deposition (μCVD) system. In contrast to conventional CNTs (carbon nanotubes) synthesis in high temperature furnaces, the technique of μCVD with localized heating provides the foundation for the direct growth of CNTs on paper. Experimentally, self-aligned...
Nano-porous structures are preferable for high-sensitive gas sensing, taking advantage of their extremely large surface-to-volume ratio. For this purpose, an inverse-opal structure of a gas-sensing material SnO2 has been fabricated between trench structures etched on a silicon wafer by utilizing the self-assembled close-packed polystyrene particles with dip coating. Performance was examined for the...
Laterally actuated nanoelectromechanical (NEM) relays are implemented using a polysilicon structural layer with hafnium oxide (HfO2) and platinum dual sidewall layers. Atomic layer deposition (ALD) HfO2 provides electrical isolation between the polysilicon beam structure and the sputtered platinum conductive channel. Dual sidewall devices are demonstrated using a Y-shaped device with two contacts...
This paper reports the fabrication of nanoprobe electrodes based on carbon nanotubes (CNTs) for intracellular recording. The nanoprobe electrodes are cantilevers of single/bundle CNTs with insulating covers and exposed tips. Parylene-coated CNT bridges were cut into probes by physical stretch. CNTs were consequently exposed at the probe tips, because of low friction between CNTs. In this method, only...
We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 µm major axis and 142 µm minor axis. The micromirror has an optical scan angle of 22° at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is...
Reflectance-based photonic crystal (PC) sensors with ALD TiO2 pillars for sensing materials with different refractive index (RI) are presented here. The relatively high RI, transparency in visible and IR region and chemical stability make TiO2 a promising material for PC sensors for applications in food or biomedical industry. An IC-compatible fabrication technique called Atomic layer deposition ARrays...
This paper demonstrates the design, fabrication and characterization of a micromachined electrostatic double-layered vibratory grating scanner for high speed, high optical resolution laser scanning applications. The prototype scanner with a 2mm diameter diffraction grating is capable of scanning a laser beam at around 21.591kHz with an optical scan angle of 33.5°, resulting a θopticalD product (product...
We report design, fabrication and characterization of MEMS enabled electro-thermally tunable 2D photonic crystal prism. The tunable photonic crystal prism was realized by utilizing thermo-optic effect of silicon. A nickel chromium heater was used to heat up the photonic crystal prism. The localized heating on the prism (to 222°C) modifies the photonic band structure, leading to an angle shift (4°)...
We demonstrate a compact, low-power device which combines a laser source, a MEMS mirror, and photo-sensors to enable fast-motion tracking of an object in a 3D volume while obtaining its precise XYZ coordinates, as well as high resolution laser-based imaging. Any object can be tracked which is marked by retro-reflective tape, or a corner-cube retroreflector (CCR). Two separate subsystems which we termed...
We demonstrate a hand-held hyperspectral fluorescence imaging microsystem, where multiple narrow-band spectral images can be captured simultaneously across the area under examination. In addition to the advantages of combined functional imaging and spectroscopy, the system demonstrates the fast scanning over large field-of-view (FOV) provided by a CMOS compatible 2-axis microelectromechanical system...
We designed, fabricated and tested a novel prototype neural interface using two-dimensional single-atom-thick graphene as microelectrode for neural applications. The cytotoxicity indicated a satisfactory biocompatibility and non-toxicity. The treatment graphene with steam plasma improved the biological properties. The action potentials of lateral giant (LG) nerve fiber of the escape circuit of an...
The scanning delay line is a key component of time-domain optical coherence tomography systems. It has evolved since its inception towards higher scan rates and simpler implementation. However, existing approaches still suffer from drawbacks in terms of size, cost and complexity, and are therefore not suitable for implementation using integrated optics. In this paper we report a rapid scanning delay...
We present the concept and realization of a micro plenoptic camera to achieve multiple viewpoint imaging with one single image capture and without moving the camera. The micro plenoptic camera is based on lightfield photography where the camera captures the 4- dimensional lightfield and images it onto a 2- dimensional CCD sensor through the use of a microlens array. The microlens array was fabricated...
Investigations into temporal development of far-from-equilibrium processes can tremendously benefit from ultra-fast x-ray pulses with picosecond time resolution and high pulse repetition rates. Current x-ray modulation techniques fall short of providing solutions for generating such ultra-fast x-rays. However, x-ray modulators based on MEMS micromirrors are promising candidates for this challenge...
This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry...
An integrated CMOS-MEMS transverse-mode square plate resonator centered at 6.52 MHz has been demonstrated with Q's ranging from 800 to 1,900, and specifically with the lowest motional impedance of 35 kΩ compared to any other CMOS-MEMS counterparts to date by the combination of large transduction area and pull-in mechanism to achieve deep-submicron electrode-to-resonator gap spacing using a foundry-oriented...
This paper describes an RF-MEMS switch structure and its fabrication process for developing low-loss multiport RF switches that integrate multiple RF MEMS switches and CMOS control circuits. In our structure, RF MEMS switches and coplanar waveguides are seamlessly integrated, and they are suspended above a CMOS LSI to reduce the loss due to the lossy Si substrate. A gold multilayer stacking technique...
MEMS resonators have stimulated an increasing interest within the last years, and many applications of this technology in fields such as telecommunications, inertial sensors, as well as biosensors, have been demonstrated. The achievement of a high quality factor (Q factor) for these devices is a key issue to maximize their performance. Therefore, there is a continuous search for the structure and...
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