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Polysilicon emitter contacts play an increasingly important role in high-speed npn bipolar transistors, particularly for emitter thicknesses of 0.1 μm or less. When optimizing these contacts, both the emitter resistance and the base current must be considered [1,2]. These two parameters are strongly dependent on the morphology of an interfacial layer between the poly and the single-crystal silicon...
Unique hybrid approach employing both model-based layout optimization and process improvement was successfully developed for reducing rapid thermal anneal (RTA) driven intra die variations. It has been applied to multiple bulk and SOI designs. The model developed herein enables fast estimation of broad-band reflectance of a random layout in 65 nm, 45 nm, and 32 nm nodes and guides reflectance leveling...
Recently, 65 nm technology-based microprocessors have been introduced into high-end products such as games processors and high- performance servers [1]. As technology development in the modern-day relies more and more on non-traditional performance- leverage elements, there is an enhanced need to tighten the coupling between development, modeling, and design. We discuss the key challenges in the inter-related...
This paper reports the experimental results of the first CMOS active pixel image sensors fabricated using a high-performance 1.8 V, 0.25 /spl mu/m CMOS logic technology. No process modifications were made to the CMOS logic technology so that the impact of device scaling on the image sensing performance can be studied. This paper highlights the device and process design considerations required to enable...
In this work, we demonstrate a 6.9 sq. /spl mu/m embedded SRAM cell in a 0.25 /spl mu/m physical design-rule salicide high-performance CMOS technology. The scalability of this salicide-CMOS embedded-SRAM technology is demonstrated by functionality of the same SRAM cell implemented in 0.35 /spl mu/m and 0.25 /spl mu/m design rules. To our knowledge this is the smallest reported SRAM cell in a salicide-only...
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