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We present a zero-power multi sensor node integrated with a nanowatt power CMOS classifier. The vibration, acoustic, magnetic, rotation, and accelerometer sensors utilize lateral bimorphs as motion sensors. The sensor node is contained in a single enclosed package which serves as both the housing for the sensors but also as a Helmholtz resonator, providing increased signal at frequencies of interest...
Surface acoustic wave gyroscopes are a solution for inertial navigation applications which require operability through high levels of shock and vibration. Integration of multiple axis gyroscopes in a small device are also needed to reduce the size and weight of the sensor system. Here we present a two-axis SAW gyroscope using bulk excited surface wave through the Lithium Niobate wafer. For the bulk...
This paper reports a mechanical stage with 3-axis angular dither capability used to calibrate 3-axis gyroscope chip. A combination of piezoelectric and magnetic actuation provides in-plane and out-of-plane motion. The 3-axis dither capability is crucial for fully calibrating the scale factor and bias of a commercial 3-axis MEMS gyroscope. The measured magnetically actuated dither stage scale factor...
This work presents frequency tuning and quadrature cancellation of a bulk-PZT gyroscope. We leverage non-linearity of elasticity and piezoelectric coupling in lateral PZT bimorphs for frequency and quadrature tuning. Frequency and quadrature tuning is demonstrated with an applied DC voltage, as a broadband control for potential closed loop operation. Resonance and quadrature tuning of ∼10ppm/Vdc and...
The near zero-power sensor node solution is presented with piezoelectric sensors and DC tunable threshold electrostatic switches. A sensor suite measuring acceleration, rotation, and magnetic field based on PZT lateral bimorphs is used with NEMS switches for the detection of a desired signal pattern and generating a wake up trigger. The sensors are capable of detecting physical signals from 5 Hz to...
We report a ∼50PPM precision in-run calibration platform for MEMS gyroscopes. In this work we demonstrate an integrated system capable of extracting instantaneous scale factor, drifts and cross axis sensitivities of the commercial ADXRS646 Z-axis gyroscope, with complete in-run rejection of acceleration sensitivities. The demonstrated method is applicable to any MEMS Coriolis force gyroscopes. The...
We demonstrate simultaneous extraction of the scale factor and cross axis sensitivity of a commercial 6-DOF Inertial Measurement Unit (IMU), which has three gyroscopes and three accelerometers, using a multi-axis, mm-scale piezoelectric dither stage. The stage is 25.4×25.4×0.5 mm, with a platform disk of diameter 7.5 mm, onto which the IMU chip is adhesively attached. The stage has small inertia allowing...
We report a multi-axis piezoelectric multi-modal mechanical stimuli stage capable of in-situ calibration of MEMS gyroscopes attached to the stage. The system is fully self-contained with electronics for portable operation. In this work, we demonstrate active calibration of a commercial Z-axis gyroscope ADXRS646 for high bandwidth applications. The dithered stage is capable of pure sinusoidal angular...
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