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Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original...
This paper presents for the first time the design and characterization of an ultra-compact 3-axis roll-pitch-yaw gyroscope which employs a single vibrational element with a torsional drive mode and a multi-directional sense modes. Implemented in wafer-level Epitaxial Silicon Encapsulation (Epi-Seal) process, device occupies an area of 1.2 mm2. Initial characterization reported in this paper includes...
This paper describes theoretical work that attempts to provide a foundation for experimentally-observed scale factor improvement of the disk resonant gyroscope (DRG) due to nonlinear effects, as observed in [1].
In this paper we developed a novel indoor localization system based on Ultra-wideband (UWB) landmarks and inertial sensor as a guidance system for emergency responders. The wake-up technology is also equipped in the system to extend the lifetime of landmarks. While in sleep mode our landmarks have an overall power consumption of 66µW making them ready-to-use in case of an emergency for up to 5 years...
We report the latest experimental results from a fused-silica Birdbath Resonator Gyroscope (BRG) with a quality factor of 419k and a resonant frequency of 9030 Hz. The BRG and its readout/control system achieve an angle random walk (ARW) of 0.00126 deg/√hr and a bias stability of 0.0391 deg/hr. These results were obtained using a force-rebalanced control architecture without temperature control or...
We demonstrate that direct frequency modulation with a pseudo random bit sequence (PRBS) improves the angle random walk (ARW) and bias instability (BIS) for a laser-driven fiber optical gyroscope over a continuous wave (CW) laser driven gyroscope. The PRBS modulation is shown to improve the ARW to 0.076 deg/hr1/2 and BIS to 2.298 deg/hr compared to an ARW of 0.172 deg/hr1/2 and BIS of 5.862 deg/hr...
This paper presents a two die assembly of inertial sensors consisting of three (3) orthogonal gyroscopes and three (3) orthogonal accelerometers which demonstrates tactical-grade performance and occupies a total volume of 112 mm3. The sensor mechanisms are identical to existing tactical-grade products while the volume reductions are achieved by combining the sensors into a two-die stack that is wafer-level...
This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 µA), low-phase-noise (−135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 µm)2 z-axis MEMS sensor fabricated in a 24-µm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both...
This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed...
This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. The presented tuning algorithm involves, first, assessing the modes mismatch using the experimental frequency responses of both proof-masses, followed by the identification of the stiffness mismatch...
This paper reports characterization of a micro actuation and sensing platform for on-chip scale factor measurement and calibration of generic MEMS inertial sensors. The platform has a unique 6-DOF-motion capability that is used to deliver calibration stimuli with minimum off-axis motion, simultaneous excitation of multiple calibration axes, and on-chip measurement of acceleration sensitivities of...
We experimentally demonstrate a mode-matched MEMS gyroscope capable of measuring rates as low as 0.2 °/hr stable on a time scale of half-a-month without ovenization or stress isolation - a long-term performance unprecedented for traditional micromachined sensors. The offset stability is attributed to the active mode-matching loop reducing adverse effects of real-world environment by maintaining zero...
In this paper, we propose a robust and accurate indoor localization and tracking system using smartphone built-in inertial measurement unit (IMU) sensors, WiFi received signal strength measurements and opportunistic iBeacon corrections based on particle filter. We utilize Pedestrian Dead Reckoning (PDR) approach which leverages smartphone equipped accelerometers, gyroscope and magnetometer to estimate...
In this study accelerometers were more effective at quantifying important differences in movement between player positions and match halves compared to global positioning systems (GPS) during matches in a professional collision-based team sport, rugby union. The purpose of the present investigation was to determine the effectiveness of the respective technologies for detecting differences in measures...
In this paper, we present the assembly process and an electrostatic actuation, detection, and tuning method of micro-glassblown wineglass resonators using an out-of-plane electrode architecture with controlled uniform capacitive gaps. This process is developed based on wafer-level deposition of a sacrificial layer on planar electrodes wafer to achieve a uniform electrostatic gap (<5µm). The materials,...
This work reports on the possibility to use gyroscopes based on piezoresistive NEMS gauges in vestibular implants. The specifications for this application are critically discussed, and used to derive parameters required at the sensor level and integrated circuit level. An algorithm to transform the acquired signals from the gyroscope reference system into the firing rate of vestibular nerves is also...
Point source interferometry (PSI) is a promising technique that could lead to a compact, high-performance gyroscope based on atom interferometry. We consider the trade-offs in size and performance with PSI. In particular, we discuss the sensitivity and dynamic range for a simple PSI gyroscope with an evacuated volume ranging from 1 mm3 to 10 cm3. We also discuss the stability required for the initial...
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