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We present a study on the effects of thermal and chemical post-processing on the surface quality of Fused Quartz, a preferable material for vibratory gyroscopes. In this study, we included the effects of thermal reflow, potassium hydroxide (KOH) etching, Buffered Oxide Etching (BOE), 10∶1 hydrogen fluoride and hydrogen chloride solution (HF/HCl) etching, and RCA-1 surface treatment. We concluded that...
We propose a method to reduce angle random walk in rate-integrating gyroscopes via additive control forces. By construction, we show that hyperbolic velocity forces satisfy this goal, demonstrate their effect with Monte Carlo simulations and discuss applicability and possible side effects.
This paper addresses the dynamic analysis of a thin ring, which is the prototype structure for the many variants of ring and disk resonators. First, a derivation of the coriolis coupling between pairs of degenerate ring modes is provided for a rotating uniform thin ring. Next, boundary conditions are determined for the case of a uniform thin ring perturbed by point masses. Finally, perturbation solutions...
In this paper, we present the first Fairchild 6-Axis MEMS inertial sensor, FIS-1100, which combines a 3-axis gyroscope and a 3-axis accelerometer in a single MEMS die. The MEMS device utilizes an industry first Through-Silicon Via (TSV) technology, with a thick single-crystal Silicon device layer bonded between a TSV layer and a cap layer under vacuum. Due to the 60µm thick device layer and high aspect...
This paper reports a tri-fold inertial measurement unit (IMU) that is fabricated with a batch-mode 3-D assembly process. Each chip of a tri-fold die includes a single axis z-gyroscope and 0–2 lateral-accelerometers. The tri-fold dies are batch-mounted on sidewalls of silicon cavities on a wafer to form 6-axis IMUs. The accelerometer has a measured bias instability of 6.8 µg and a noise floor of 66...
This paper reports a novel Center Support Quadruple Mass Gyroscope (CSQMG), which combines the advantages of tuning fork gyros (TFGs, large mass and high resolution) and the micro hemisphere resonant gyros (MHRGs, fully symmetric and high Q), and is expected to achieve performance breakthrough of flat structures. The operation of the CSQMG is based on four proof masses symmetric distributed circumferentially,...
The structure design of an improved dual-mass decoupled micro-gyroscope(DDMG) was presented in the paper. The non-ideal decoupled error was suppressed by the improved drive decoupled beam. The improved drive decoupled beam reduced the drive decoupled torque by decreasing the moment arm, which was beneficial to suppress the rotational displacement error of sense frame in drive mode. At the same time,...
The 746th Test Squadron at Holloman AFB, New Mexico completed an extensive characterization effort to determine the ability of the 120-inch radius centrifuge to provide precise centripetal accelerations to an item under test. The characterization of the radius growth revealed a well behaved system. The observed hysteresis reinforced the use of in-situ monitoring during tests. The distinct differences...
In this paper we present the recent improvement of a silicon micro-mechanical vibrating beam accelerometer (SVBA) which combine the advantage of low cost of silicon MEMS fabrication technology, small size vacuum wafer level package, low noise low power application-specific integrated oscillation circuit and digital frequency demodulation technology. Under room temperature, it has achieved bias instability...
Here we present an optomechanical accelerometer with DC resolution at 730ng/Hz1/2 that when driven into sustained-oscillation mode, the slot photonic crystal cavity provides a radio-frequency (RF) readout of the optically-driven transduction with an enhanced sensitivity of 196 ng/Hz of RF shift. This advanced sensitivity as well as the solid-state room-temperature silicon architecture make the DC...
Comparison of FEM simulations and experimental data about low-frequency spectra for a party of hemispherical quartz-glass resonators have been discussed as well as prediction of their values in the assemblies of the gyroscopes.
This paper presents the design, fabrication and preliminary characterization of a new type of multi-axis capacitive accelerometer with sub-µg resolution based on a robust CMOS-compatible 2-gap fabrication technology that can provide large proof-mass (1 mm tall, >2.33 milligram/mm2), high aspect-ratio (HAR) narrow sense gaps (<3 µm wide, >250 µm tall) and large sense/feedback electrode area...
This work demonstrates high-performance in a low-footprint MEMS gyroscopes based on piezoresistive nano-gauge readout. Significant noise reduction can be obtained by increasing the current dissipation in differential nano gauges, each having a (250 nm)2 cross-section. Though the device is fabricated in a low-cost process and operates at relatively large pressures (about 4 mbar), the achievable angle...
Rate Integrating Gyroscopes (RIGs) excel at measuring high rates of rotation, however for rotation rates less than the drift due to frequency or damping mismatch the measured angle will not track the rotation angle and the gyro will effectively fail to operate. Here we show that by applying large virtual rotation using the gyroscope's control electrodes, the drift due to damping mismatching is averaged...
Field Operational Tests are conducted in the automotive industry to obtain data in large-scale testing programs under real operating conditions. In this paper we present a novel measuring device, which has many advantages compared to common instrument devices employed for Field Operational Tests. It consists of a Micro-Electro-Mechanical System inertial sensor and a GPS module coupled with a Raspberry...
This paper reports a novel, low-cost and inherently simple vertical signal transmission method for glass-silicon-glass sandwich micro-electro-mechanical systems (MEMS) gyroscopes based on heavily doped silicon-bridge. As for the fabrication technique, only glass-to-silicon anodic bonding and after-laser-trimming process are needed, which are fully compatible with standard MEMS technology. Micro gyroscopes...
This paper presents a novel micro shell resonator (MSR) with eight circular-distributed T-shape masses based on fused silica (FS), which is fabricated by combining micro blowing-torch process with high precise mold. FS is been heated instantaneously above the softening point by micro blowing-torch and flow down into the mold. The resonator shell is shaped using a pressure difference and surface tension...
Hysteresis is the main thermal effect that must be compensated after bias and scale factor calibration for inertial grade accelerometers. If the hysteresis comes only from dynamic lag between the temperature and bias, this effect should disappear for an adiabatic change of the temperature. In this case the effect is referred to as rate dependent hysteresis. However, some sensors present a residual...
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