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For the decoupled dual-mass silicon Micromachined gyroscope developed by Southeast University, drive mode and sense mode are analyzed. In order to improve the precision of silicon Micromachined gyroscope, the demodulation algorithm based on synchronous integrator circuit for gyroscope digital control system is proposed. Combining with Automatic Gain Control (AGC) and Phase-Locked Loop (PLL) technology,...
This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide- semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital...
We welcome you to the Big Island of Hawaii to present, exhibit, and participate in the 2nd IEEE International Symposium on INERTIAL SENSORS and SYSTEMS (IEEE Inertial Sensors). This exclusive symposium is organized this year in the boutique oceanfront Hapuna Beach Prince Hotel, Hawaii, USA. This event continues our recently established tradition, started last year in Laguna Beach, CA, of informal...
We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch’s algorithm. Despite the fact that this DRG is over 5 orders...
This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same...
This paper gives a detail description of a silicon vibration beam accelerometer which was fabricated by SOI technology and encapsulated in a wafer level vacuum package. The wafer level package gives advantage of small size and low cost, but also produce additional residual stresses that increased the temperature coefficient of the vibration beams. To solve this problem, the sensing structure was redesigned...
This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as...
Draper designed and constructed traditional mechanical gyroscopes for Apollo and for strategic guidance systems. In 1984, Draper started the double gimbal gyro, which led to the silicon-on-glass tuning fork gyroscope that reported the first useful performance of a silicon MEMS gyroscope in 1992. This work became the basis for the successful Honeywell MEMS inertial measurement units and the starting...
An overview of conceptual, analytical and experimental elements to quantitatively describe human kinematics, with specific focus on gait, using magneto-inertial sensors is presented. It includes a review and a taxonomy scheme of the techniques for the estimation of joint kinematics and spatio-temporal gait parameters.
A critical element for inertial navigation is precise knowledge of the angular kinematics which are measured using gyroscopes. Optomechanics has been shown to be the most sensitive scheme for measuring mechanical motion [1, 2]. In this paper, we demonstrate electrostatic actuation and optical sensing of orthogonal wineglass modes on a silicon-on-insulator (SOI) platform as a fundamental building block...
We propose a method for real-time shape sensing of thin and flexible materials such as fabric. Method is based on 3-axial acceleration and magnetic sensor nodes that are embedded into the material. It is designed for new emerging applications such as smart textile and flexible electronics. Method allows easy sensor integration in material and shape model reconstruction with at least 10 frames per...
This paper reports on the development of a micromechanical vibrating mass tuning fork gyroscope with coupled drive and sense modes. The mechanical structure has been designed to have a first anti-phase drive mode and a second anti-phase sense mode. The frequencies of all other modal modes are higher. The micromechanical structure is fabricated with a cavity SOI technology called BDRIE [1]. The analog...
This paper investigates effect of substrate thickness on energy drift from anchor of mechanical resonators. A finite element (FE) method is utilized to capture energy loss from the anchor. To eliminate wave reflection from the outer boundaries of the resonator substrate model, a perfectly matched layer is used. This artificial layer absorbs waves before they reach to the outer boundaries of truncated...
This work presents neMEMSi-TEG, an ultra-low power MEMS based inertial and magnetic platform with embedded processing and wireless communication capabilities. The platform embeds an advanced energy management IC that allows an extremely high efficiency energy harvesting suitable for low-power and miniaturized Thermoelectric Generators. This paper aims to provide a description of the architecture of...
This paper presents the recent reduction of the die size by 44% in the Advanced MEMS (aMEMS) process, now being compatible in size with most of the available through-wafer packaging processes while offering the unique simplicity of the aMEMS process. Size reduction is achieved by reducing the pitch of vertical feedthroughs from 700 μm down to 350 μm and the bonding area width from 300 μm down to 100...
Many kinds of indoor positioning systems have been investigated, and location-based services have been developed and introduced. They are individually designed and developed based on the requirements for each service. This paper presents a map platform that accommodates any positioning system in order to utilize the platform for various application systems. The requirement conditions are summarized...
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