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This paper presents a fully-configurable digital system that emulates MEMS inertial sensors. Its main function is to synthesize all the electro-thermo-mechanical features of the device, in order to allow the characterization of electronic systems (ASICs for MEMS or MEMS-dedicated instrumentation) coupled to the (emulated) MEMS, (i) without the need to have a physically available sensor and (ii) with...
This paper reports a mechanical stage with 3-axis angular dither capability used to calibrate 3-axis gyroscope chip. A combination of piezoelectric and magnetic actuation provides in-plane and out-of-plane motion. The 3-axis dither capability is crucial for fully calibrating the scale factor and bias of a commercial 3-axis MEMS gyroscope. The measured magnetically actuated dither stage scale factor...
This paper presents a study on the structural rigidity of an Inertial Measurement Unit (IMU) implemented using the Folded MEMS approach. For such folded structures, environmental survivability and stability is a natural concern. We investigated IMUs of 35 mm3 (small) and 130 mm3 (medium) in volume, in the shape of a cube and a pyramid, and considered the reinforcement methods, including epoxy, eutectic...
This paper reports on zero-rate noise contributions in a closed-loop MEMS vibratory gyroscope. In particular, we are investigating sources and composition of bias instability noise. This 1/f-noise is the dominant error component when integrating the angular rate for durations on the order of one minute. It is demonstrated that mechanical quadrature is not responsible for the bulk of bias instability...
This paper presents a two die assembly of inertial sensors consisting of three (3) orthogonal gyroscopes and three (3) orthogonal accelerometers which demonstrates tactical-grade performance and occupies a total volume of 112 mm3. The sensor mechanisms are identical to existing tactical-grade products while the volume reductions are achieved by combining the sensors into a two-die stack that is wafer-level...
This paper presents an algorithm based on the Robust Extended Kalman filter (REKF) for non-line-of-sight (NLOS) mitigation and sensor data fusion. The aim is to locate an off-the-shelf smartphone using only its speaker and its inertial measurement unit (IMU). The target emits inaudible sound signals which are detected by static receivers on the ceiling. Then, its position can be estimated using time...
This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 µA), low-phase-noise (−135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 µm)2 z-axis MEMS sensor fabricated in a 24-µm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both...
This paper presents a development of a seismic sensor for the future Compact Linear Collider (CLIC). Sensor in which three different types of sub-nanometre displacement transducers have been integrated: a Fabry-Pérot interferometer, an optical encoder and a capacitive transducer. This sensor allows us to compare the resolution of all the transducers under the same conditions, thus enabling us to verify...
This paper presents for the first time the design and characterization of an ultra-compact 3-axis roll-pitch-yaw gyroscope which employs a single vibrational element with a torsional drive mode and a multi-directional sense modes. Implemented in wafer-level Epitaxial Silicon Encapsulation (Epi-Seal) process, device occupies an area of 1.2 mm2. Initial characterization reported in this paper includes...
This paper describes theoretical work that attempts to provide a foundation for experimentally-observed scale factor improvement of the disk resonant gyroscope (DRG) due to nonlinear effects, as observed in [1].
We have designed and fabricated the first “integrated optical driver” chip for fiber gyroscopes on Si/III–V heterogeneous integration platform. The chip was successfully interrogated with a fiber coil to realize an open-loop IFOG.
A MEMS acceleration latching switch has been developed through concept, analysis, design and prototype test in this paper. The switch has the sensitivity to both thresholds of acceleration amplitude and pulse width. Its mechanism of action lies on the mutual collision and friction of the mass and damping anchor when the switch is suffered from different acceleration loads. Typically, it keeps off-state...
This paper presents a novel, versatile process for the fabrication of wide and deep cavities for silicon MEMS devices without the need for wafer bonding. Instead of filling large trenches with sacrificial materials before encapsulation or directly using wafer bonding, we present a method that utilizes isotropic etching with XeF2 gas through a thin silicon dioxide film prior to the deposition of encapsulation...
This paper presents an assisted personalized navigation system which makes use of inertial based navigation algorithms in combination with acoustic mapping sensors to perform barrier detection and avoidance. The systems can track, in real time, the position of a user in any environment using a foot mounted Inertial Measurement Unit (IMU). This paper discusses techniques used to combine data from a...
This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed...
This paper reports on status of components development for miniaturized nuclear magnetic resonance gyroscopes (micro-NMRG). The reported components are (1) coils to generate and control the magnetic field, demonstrating experimental magnetic field to current ratio of B/I=214.1 uT/A and resulting in an estimated magnetic field homogeneity of H=354ppm, (2) a micro-fabricated spherical cells demonstrating...
This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. The presented tuning algorithm involves, first, assessing the modes mismatch using the experimental frequency responses of both proof-masses, followed by the identification of the stiffness mismatch...
This paper discusses a new research about the relationship between the thermoforming factors and the geometric dimension of the Hemispherical Resonator Gyro (HRG) sensitive structure, especially the ambient pressure factor. For the study, a high temperature furnace system with visible internal workspace and adjustable pressure range is designed and applied to monitor the whole process. By means of...
This paper reports characterization of a micro actuation and sensing platform for on-chip scale factor measurement and calibration of generic MEMS inertial sensors. The platform has a unique 6-DOF-motion capability that is used to deliver calibration stimuli with minimum off-axis motion, simultaneous excitation of multiple calibration axes, and on-chip measurement of acceleration sensitivities of...
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