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IEEE Transactions on Semiconductor Manufacturing > 2006 > 19 > 4 > 372 - 380
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control > 2002 > 49 > 8 > 1114 - 1117
IEEE Transactions on Semiconductor Manufacturing > 2006 > 19 > 4 > 372 - 380
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control > 2002 > 49 > 8 > 1114 - 1117