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We report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN). Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment,...
Several applications require (ultra-)thin and reliable packaging of the sensor electronics. Especially the rapidly increasing use of sensor elements in nearly every field of engineering is the main driver for that fact. One specific application is magnetic field sensors in active magnetic bearings. In order to improve their precision and stiffness those bearings can be beneficially operated by measuring...
The Institute of Micro-and Nanotechnology MacroNano® at Technische Universität Ilmenau was founded in 2005 to provide a structural base for interdisciplinary research ranging from basic to applied and application-oriented research with a strong focus on nano- and microsystems. It comprises the competences of several engineering and natural science groups of the university. The paper will cover current...
Ag sintering has been widely studied as a lead-free die attach solution for power electronics. A soak time of a dozen minutes at the sintering temperature is necessary to establish strong bond strength by the conventional heating method. Chemical bonding can be achieved by various parameters associated with the metallurgical bond of the adjacent surfaces. In this study, attaching technology between...
In this paper, a study is conducted into using semiconductor materials in designing nanoantennas for solar energy harvesting. Different thin wire dipole nanoantennas made of carbon, heavily doped Ge and heavily doped Si are designed and their performance is compared with metal nanoantenna made of gold. Method of moments (MoM) is employed to numerically solve Hallen's integral equation in order to...
We present the low-cost microfabrication of three-dimensional Au nanotip pyramidal electrode array by selective and anisotropic etching η-type Si in tetramethylammonium hydroxide (TMAH) solution. The influence of the TMAH etchant concentration and bath temperature on the on lithographically patterned Si etch rate was investigated. Using buffer oxidize etching technique of thermal oxide, sputtered...
We have successfully integrated an amperometric ion sensor array on an Si chip which simultaneously detects potassium ion (K+) and sodium ion (Na+). The sensor array has two kinds of selective electrodes which exhibit high sensitivity for K+ over Na+ (K+-selective electrode) and for Na+ over K+ (Na+-selective electrode), respectively. Ion transfer voltammetry method was adopted for the detection of...
We suggest a novel hybrid nanoantenna, consisting of a gold nanorod and a silicon nanodisk, which provides giant enhancement of directional emission together with high radiation efficiency. We demonstrate its fabrication by two-step electron-beam lithography.
We demonstrate effective carrier depletion by metal-semiconductor-metal junctions for a silicon waveguide. Photo-generated carriers are efficiently swept out by applying bias voltages, and a shortest carrier lifetime of only 55 ps is demonstrated.
We observed the nonlinear electron dynamics in polycrystalline gold (Au) thin films via intense terahertz spectroscopy. Under the intense terahertz wave illumination, the transmittance of Au thin film decreases, indicating that the damping constant of electrons becomes smaller due to the suppression of the grain-boundary effect on electrons induced by the intense terahertz field.
A plasmonic mode-evolution-based device rotates the TE mode in silicon waveguide and couples it to the hybrid plasmonic mode with a 92% peak coupling factor and −3 dB bandwidth of over 500 nm at near infrared.
A metasurface is proposed to combine DC and laser induced discharges in micro scales. The structure is intended to be used as a platform for a new class of microplasma devices with electro-optical activation.
We design by transformation optics, fabricate by three-dimensional direct laser writing, and characterize experimentally polymer-based cloaks for 20 μm wide gold-wire contacts on a silicon wafer. The contact shadowing effect is reduced by 90%.
We design and fabricate an on-chip Dirac-cone metamaterial with impedance-matched zero index at 1550 nm. This design can serve as an on-chip platform to implement applications of Dirac-cone metamaterials in integrated photonics, such as supercoupling.
The photo-thermo electrical conversion system using black silicon and gold nanoparticles have been suggested for energy harvesting. Efficient light absorption with black silicon and plasmonic photo-thermal energy conversion was successfully improving the energy conversion efficiency of light. Totally ∼50% of improvements has been achieved with optimization of Au nanoparticles diameters and density.
We demonstrate a thermally tunable silicon grating coupler. The experimental result of ∼10nm shift in center wavelength at about 410mW electrical power was in reasonable agreement with the expected ∼16nm tuning range.
Propagation characteristics of magnetic and nonmagnetic plasmon waveguides using Au and Fe have been studied. The devices are theoretically optimized and fabricated on a SOI substrate. The transmission characteristics are investigated on those waveguides.
The dynamic configuration and evolution of large-scale heterogeneous systems such as distributed systems has made the enforcement of security requirements one of the most critical phase throughout system development lifecycle. In this context, specifying, deploying and then updating a security policy is a complex task. In the vast majority of cases, this task is being carried out in an artisanal way;...
During this decade, Wireless Sensor Networks received an increasing amount of attention from the industrial and research world. One of their applications is the indoor localization of nodes. A distance evaluation mechanism between nodes, called ranging, is required to precisely determine the nodes' positions. The research work presented in this article relates to this topic and aims to use Ultra Wide...
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