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Partial discharge phenomenon, which is not breakdown but has a potential to lead breakdown, is sometimes observed under AC operating voltage application in vacuum. We aim to investigate the partial discharge on the insulator surface in vacuum by the measurement of charge behavior and light emission. The surface charge distribution reached a quasi-stationary state by repetition of the partial discharge...
MEMS-based penetrating probe electrode devices have opened a new class of multi-site electrophysiological recordings of neurons/cells in a tissue with a high spatial resolution. Although these probes becomes a powerful tool in electrophysiology, the challenge still remains the tissue penetrations with small diameter probes for further low-invasive and safe tissue penetrations. However, it is difficult...
The charge behavior and partial discharge characteristics, which is not breakdown but has a potential to lead breakdown, at solid-composite system in vacuum can be a critical issue to be investigated, under ac operating voltage application. We investigate the partial discharge along an insulator surface in vacuum under AC voltage application by the measurement of the charging and the light emission...
A multimodal bio-image sensor for proton (pH, power of Hydrogen) and filter-less fluorescence imaging is developed, and its prototype has been fabricated using CMOS silicon integrated circuit technology. Both pH and fluorescence images were successfully obtained without optical filters or gratings and simultaneously in the same area in real time using the developed image sensor for the first time...
We report a 8-12-μm-diameter 210-μm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-μm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103 kΩ and a more than 90% output/input ratio (1 kHz) for spike recordings. Through...
Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric...
This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both...
A multi-modal sensor, with which was possible to simultaneously measure pH, electrical conductivity (EC) and temperature, was fabricated. The pH sensor, EC sensor, and temperature sensor were integrated using compatible complementary metal-oxide semiconductor (CMOS) logic technology on a small Si chip (area, 25 mm2). Simultaneous measurements of pH, EC and temperature were demonstrated, and the sensor...
We report in-vitro multisite field potential recordings from fish retina using a vertically integrated silicon (Si) microprobe array. Eight active channels of the enlarged probe-head ldquoKokeshi (Japanese dolls)rdquo type Si probe enabled multisite electrical recordings of retinal responses (electroretinograms (ERGs)) to white light stimuli. The ERG a- and b-waves were obtained at each probe, and...
A highly sensitive L-glutamate biosensor based on glutamate oxidase (GLOx) has been fabricated on N-(3-dimethylaminopropyl)-N'-ethylcarbodiimide hydrochloride (EDC) activated thioglycolic acid (TGA) self assembled monolayer (SAM) on smart-biochips, where K3Fe(CN)6 and TGA-SAM are used as a mediator and an enzyme immobilization matrix, respectively. The glutamate biosensor displayed a fast response,...
This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
We report applications of sub-5 μm diameter silicon microprobes and silicon dioxide microtubes fabricated by vapor-liquid-solid method and microfabrication techniques, to use in in-vivo animal experiments. Before animal experiments, electrical impedance and test signal detection via the microprobe electrode were investigated. According to the results, electrical impedance at 1 kHz is approximately...
We have investigated numerically the optimization of newly designed Pb(Zr,Ti)O3 (PZT) actuated segmented μ-mirror device used particularly in bio-medical application for adaptive optics. By performing advanced finite element modeling that includes thermo-mechanical and piezoelectric simulations an optimal μ-mirror device design is suggested maintaining its structural integrity intact.
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
In this study, a CMOS process-compatible MOSFET-type biosensor with a built-in Ag/AgCI thin film reference electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCI...
We successfully fabricated a super high sensitivity charge transfer type pH sensor. The proposed pH sensor is possible to amplify the sensing signals without an external amplifier by accumulation cycle. The pH sensitivity was obtained 5048 mV/pH, which is approximately 100 times higher than the Ion Sensitive Field Effect Transistor (ISFET), which is the most familiar pH sensor using semiconductor...
PUE films have been found to exhibit an electrostriction effect. We propose the applying them to a moving device such as an actuator similar to artificial muscles using the electrostriction effect. The actuators are of monomorph type fabricated by PUE film and metal electrodes evaporated at different thickness on the film surfaces. Because these actuators work at a high voltage of more than 1 KV,...
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