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This paper addresses the key drivers of the "MEMS Epiphany," i.e. the successful interplay between the technology push and design-driven innovation strategies for MEMS (micro-electromechanical systems) success in the consumer market. Before 2005, MEMS were known only by technology experts and were not yet ready for the high-volume consumer market. Only the marriage of a technological breakthrough...
The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques...
This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent...
A novel concept of ultra-broadband multi-stage digital-type microwave MEMS phase shifters with the best performance optimized for W-band applications is introduced in this paper. The relative phase shift of 45deg of a single stage is achieved by vertically moving a lambda/2-long high-resistivity silicon dielectric block above a 3D micromachined coplanar waveguide (3D CPW) by electrostatic actuation,...
Micromechanical resonant displacement gain stages have been demonstrated that employ directionally engineered stiffnesses in resonant structures to effect displacement amplification from a driven input axis to an output axis. Specifically, the introduction of slots along the output axis of a 53-MHz wine-glass mode disk resonator structure realizes a single gain stage with a measured input-to-output...
This paper shows the first successful combination of dielectrically-transduced 200 MHz resonators with the epi-silicon encapsulation process, and demonstrates a set of important capabilities needed for the construction of CMOS-compatible RF MEMS components. The result shows the resonant frequency of 207 MHz and a quality factor of 6,400. The high fQ (1.2times1012 Hz) makes this encapsulated resonator...
This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS switch with low sensitivity to stress gradients and temperature variations. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and has excellent microwave performance to > 40 GHz.
A microbial fuel cell with a microfabricated electrode and exoelectrogenic bacteria has been demonstrated. The superior compatibility of the organism's microbiology makes this approach more attractive and practical over previously micromachined microbial fuel cell designs. Both electrical performance and longevity of the device are greatly improved with continuous power output for over a week and...
We have developed a fully integrated micro power generator, based on a hydrogen fuel cell. Key to the power generator is an on-board hydrogen production with a passive microfluidic control valve that provides self-regulating operation. Critical integration issues are identified and regimes established for efficient power generation. Preliminary results demonstrate the ability of our device to operate...
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