This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both eigenfrequencies and eigenmodes. Eigenmodes were found to be significantly changed and shifted with such a stress state. Dynamic harmonic analysis exhibited a significant maximum vertical deflection of ~28 ??m attainable with the actuator when excited at a resonant frequency of 112,600 Hz under 2D scanning mode.