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A previous study on long term reproducibility [1] demonstrated that CAMECA Wf can delivered the relative standard deviation (RSD) of the relative sensitivity factors (RSF) of boron (B) are typically 3.7%. Above results show that deviation can be estimated without testing the standards. This paper will demonstrate that the SIMS RSD depend significantly on the species concentration.
A surface layer formation by Cs+ bombardment was observed during ultra-thin oxynitride gate dielectrics depth profiling. A significant thickness change relative to ultra-thin layer of oxynitride was noticed when testing a bombarded sample after a period of time. Cs, O and N depth profiles were examined by Dynamic Secondary Ion Mass Spectrometry (DSIMS). The bombarded sample and new sample were investigated...
A case study on isotope antimony for buried implant is presented in this paper. The electrical test was found to correlate to the total dopant dose instead of each isotope present at the wafer. Thus the SIMS qualification has to use sum of both isotopes 121Sb and 123Sb for dopant matching.
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