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This paper reports our cumulative progress toward the development of a gyroscope with two interchangeable modes of operation: an Amplitude Modulated (AM) mode, for a precision measurement in more conventional ranges (∼300 deg/sec) and a Frequency Modulated (FM) mode, for an expanded range of operation (over 300 deg/sec and as high as 18,000 deg/sec). We demonstrate that the implemented self-calibration...
This paper presents detailed performance status, modeling, and projections for the silicon MEMS Quadruple Mass Gyroscope (QMG) — a unique high Q, lumped mass, mode-symmetric Class II Coriolis Vibratory Gyroscope (CVG) with interchangeable whole angle, self-calibration, and force rebalance mechanizations. To support experimental work, a standalone CVG control and test suite was developed and implemented,...
This paper reports experimental demonstration and characterization of the MEMS Quadruple Mass Gyroscope (QMG) operated in three distinct mechanizations, namely force rebalance, whole angle, and virtual carouseling self-calibration. The three runtime interchangeable control modes are implemented using a custom standalone electronics suite running control firmware with a separate computer GVI for experiment...
This paper reports a new type of degenerate mode gyroscope with measured Q-factor of > 100,000 on both modes at a compact size of 1760 μm diameter. The toroidal ring gyroscope consists of an outer anchor ring, concentric rings nested inside the anchor ring and an electrode assembly at the inner core. Current implementation uses n = 3 wineglass mode, which is inherently robust to fabrication asymmetries...
We report a scale factor self-calibration in MEMS Coriolis vibratory gyroscopes enabled by real time control of the sense-mode closed loop gain. Similarly to the closed loop scale factor employed in the Hemispherical Resonator Gyroscope (HRG), we measure and remove scale factor changes by injecting a known dither signal (virtual input rate) into the sense-mode dynamics during the normal operation...
We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown wineglass resonators with integrated electrode structures. A new fabrication process based on deep glass dry etching was developed to fabricate micro-wineglasses with self-aligned stem structures and integrated electrodes. The wineglass modes were identified by electrostatic excitation and mapping the velocity of motion...
We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with < 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry...
We demonstrate north-finding capability with a measured 4 milliradian (mrad) 1-σ uncertainty using an in-house developed vibratory silicon MEMS quadruple mass gyroscope (QMG). We instrumented a vacuum packaged QMG with isotropic Q-factor of 1.2 million and bias instability of 0.1 °/hr for azimuth detection by measuring the Earth's rotation. Continuous rotation (“carouseling”) produced azimuth datapoints...
We report, for the first time, a quasi-digital angular rate sensor based on mechanical frequency modulation (FM) of the input rotation rate. The new approach relies on tracking of the resonant frequencies of two ultra-high Q-factor mechanical modes of vibration in a MEMS vibratory gyroscope to produce a frequency based measurement of the input angular rate. Rate table characterization of the new FM...
This paper introduces a new paradigm for design and batch fabrication of isotropic 3-D spherical shell resonators. The approach uses pressure and surface tension driven plastic deformation (glassblowing) on a wafer scale as a mechanism for creating inherently smooth and symmetric 3-D resonant structures. The feasibility of the new approach was demonstrated by fabrication and characterization of Pyrex...
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