The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A Radiation Pressure driven Optomechanical Oscillator (RP-OMO) comprised of attached concentric rings of polysilicon and silicon nitride has achieved a first demonstration of a mixed material optomechanical device, posting a mechanical Qm of 22,300 at 52 MHz, which is more than 2× larger than previous single-material silicon nitride devices [1]. With this Qm, the RP-OMO exhibits a best-to-date phase...
This paper presents a tunable iris based on electromagnetic actuation for a tiny high-performance camera in mobile devices such as smart phones and pads. To investigate the effect of a magnetic field on a ferrofluid, the contact angle modification and transportation of a sessile ferrofluid droplet are tested using a neodymium magnet and electric coil. The variation of the contact angle of the ferrofluid...
We proposed low-temperature Au-Au bump interconnects bonding using nanoporous Au-Ag powders as a connective adhesion. The nanoporous powders were formed by de-alloying Au-Ag alloy in HNO3 solution. To optimize the pore size, the influence of the annealing temperature on the porous structures was investigated. Selective transfer of the nanoporous powders on bumps was obtained by stamping process. Bonding...
We developed a calorimetric device for measuring thermal diffusivity non-destructively. The calorimetric device was based on the principle that temperature phase delay between a heater and a resistance temperature detector (RTD) is affected by thermal diffusivity of the region between them. The device consisted of an Au wire, as oscillating heat source and a piezoresistor as an RTD. We exerted the...
This paper presents the implementation of a transience mechanism for silicon microchips via low-temperature postprocessing steps that transform almost any electronic, optical or MEMS substrate chips into transient ones. Transience is achieved without any hazardous or explosive materials. Triggered chip transience is achieved by the incorporation of a distributed, thermally-activated expanding material...
This work presents a graphene-diamond-metal thin film system as ultraviolet (UV) light sensor on a flexible substrate. New scientific and engineering breakthroughs are: (1) first experimental investigation of electrical and optical properties of carbon-based sp2-sp3 (graphene-diamond) junction; (2) a peel-and-stick fabrication process to make flexible diamond thin films from CVD-grown micro crystalline...
A hydrophobicity recoverable EWOD (electrowetting-on-dielectric) based chemiluminescence detector with an integrated signal and heater electrode was developed. X-ray-photoelectron-spectroscopy (XPS) was used to reveal the wetting and dewetting mechanism of Teflon on the EWOD device. It was found that the C-O bond formed on the surface of Teflon after the chemiluminescence reaction leaded to the surface...
We report on initial experimental demonstration of probing the dynamics of nanoscale contacts in robust nanoelectromechanical switches based on silicon carbide (SiC) nanocantilevers. For the first time, we measure the dynamical behavior of contact-mode SiC nanoscale electromechanical switches by directly probing the vibrating tips of the SiC nanocantilevers, using ultrasensitive laser interferometric...
We report frequency-dependent bidirectional AC electroosmotic flow (AC-EOF) in a nanochannel with double layer overlap. This work follows our report in μTas 2008 of unidirectional AC-EOF in nanochannels [1]. Observed is a bidirectional pumping behavior; simulations of the low frequency pumping confirm a direction opposite to that of AC-EOF in microchannels. By this frequency-dependent bidirectional...
In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO2 gate oxide demonstrate full pH-response with ΔVth ≈ 56 mV/pH. High readout sensitivity Sout = ΔId/Id ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and Ion/Ioff =1.5×10...
In this study, we report a surface acoustic wave (SAW) driven atomizer for polymeric nanoparticles synthesis based on evaporation-induced self-assembly (EISA). The atomizer consisted of a pair of arc-shaped interdigital transducer (AS-IDT) was designed for converging the SAW into a solvent. The atomizer can generate a point-source narrow mist spray and is very useful to improve the yield of nanoparticle...
This paper reports the design of thermopile infrared sensor for human detector application. Sensitivity and response time of thermopile infrared sensor element are important for human detector application. In order to fulfill the specification, we developed S-shaped structure for thermopile infrared sensor element and fabrication process of chip scale vacuum package for mass production of the thermopile...
Plasmonic nanostructures (hotspots) are key components e.g. in plasmon-enhanced spectroscopy, plasmonic solar cells, or as nano heat sources. The characterization of single hotspots is still challenging due to a lack of experimental tools. We present the direct photothermal probing and mapping of single plasmonic nanoslits via the thermally induced detuning of nanomechanical string resonators. A maximum...
This paper reports the very low power consumption MEMS scanner that utilizes the electrostatic field generated by alkali-ion electret. The alkali-ion electret formed on comb electrodes of the scanner provides built-in potential for the electro-static actuator so that no bias voltage is necessary. The power consumption of prototype MEMS scanner was 0.57 μW (bias voltage: DC 0 V, driving voltage: AC...
This paper presents de-ionized water droplets used as torque-generating micro-bearings between a glass plate and a micromachined Si substrate. The pattern on the Si substrate includes circular tracks, which allow droplet motion in a single direction. When vertical vibration is applied to the system, a rotation in the transverse plane is triggered. The system can be tailored to respond to a specific...
In this work, we developed a conductive silver nanowire (AgNW)-PDMS composite thin film for a flexible strain sensing application. The piezoresistivity of AgNWs-PDMS nanocomposite thin film was experimentally investigated and analyzed by a computational model. The strain sensor shows a strong piezoresistivity with an average gauge factor in the ranges of 1.6 to 14 and a high stretchability up to 70...
We present the highest resolution imaging performance attained to date with a single-chip Atomic Force Microscope (AFM) that does not require off-chip scanning or sensing hardware. The marked improvement in sensitivity of the instrument stems in part from an internal quality (Q) factor enhancement mechanism that relies on the interplay between effects in the electrical, thermal and mechanical domains...
We present a liquid crystal elastomer (LCE) actuator with large stroke and fast reaction time. LCEs show a large macroscopic shape change when heated above the phase transition (≈120 °C). Buried wafer-level fabricated micro-heaters offer optimal thermal reaction times and compact design of the actuators. A relative length change of λ = 1.28 was obtained with 320 mW power consumption. Heating the device...
We present a membrane sealed fluidic lens that is hydrostatically connected to a concentric ring-shaped electroactive elastomer. Electrical activation deforms the ring-shaped elastomer, which induces fluid passage between the lens part and the actuation part of the membrane. This changes the lens's shape and therefore the focal length. The focal length ranges from 25.4 mm to 105.2 mm can be obtained...
This paper presents a novel actuator for energy harvesting from ambient acoustic noise using acoustically oscillating droplets. When a liquid droplet sitting on a piezocantilever is excited by an acoustic wave around its natural frequency, it oscillates and simultaneously bends the piezocantilever by the reaction of the droplet oscillation, resulting in electric power generation owing to the piezoelectric...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.