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In this paper, a novel silicon nanowire photodetector on a flexible substrate is presented for replacing the function of photoreceptors in the retina to restore vision for the blind. An extremely high surface-to-volume-ratio characteristic of nanowire is capable of developing highly-sensitive photonic sensors. Therefore, a nanowire photodetector can be used as a stand-alone visual perception device...
We report a nano-electromechanical scanning three-probe system with monolithically integrated JFETS. JFETS can be used to pre-amplify differential tunneling currents and atomic forces. The JFET is integrated directly into the probes to reduce parasitics and mismatches and provide enhanced signal transduction and low noise operation. Three probes are co-fabricated, with the center probe being able...
This report presents an unprecedented back-end method for biofunctionalizing a large-scale array of nanocantilevers. The method presented here relies on the use of a modified nanocontact printing (nCP) process where antibodies are delivered onto a chip containing up to 106 nanostructures/cm2 from the high-parts (grooves) of a polymer stamp while its base sits on the nanocantilevers' chip, thus providing...
This paper reports on ultra-scaled single-crystal Si NEMS resonators (25–40nm thick) operating in the 10–100MHz frequency range. Their first monolithic integration at the front-end level with CMOS enables to extract the signal from background leading to possible implementation of direct/homodyne measurement, for high sensitivity sensing applications and portable systems.
We demonstrated microscale cooling by a solid state micro magnetic refrigerator (SSMMR). The SSMMR consists of thermally isolated magnetic material (La(FexSi1−x)13Hy), two thermal switches and a magnetic field switch. Thermal isolation structure and thermal switch were fabricated using MEMS fabrication process. The magnetic field switch were designed and fabricated to change the magnetic flux density...
We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness...
This study presents a new suction-type microfluidic system capable of rapid measurement of alpha-fetoprotein (AFP) by utilizing magnetic bead-based technologies. Two modules, including a suction-type incubator for the magnetic beads to capture AFP and acridinium ester (AE)-labeled anti-AFP antibodies and a microfluidic control module for sample transportation, were integrated into this microfluidic...
This paper describes a bilayer lipid membranes (BLMs) chip capable of solution exchange. In the previous report, we successfully reconstituted α-hemolysin (αHL) in BLMs using droplets contacting method with an array device. For drug screening, solution exchange is required to test the effect of inhibitors or promoters for proteins. In this study, we attempted to exchange the solution in a droplet...
This paper presents a 3D tumor spheroid chip for the on-chip formation and perfusion culture of spheroids using gravity-driven cell aggregation and pumpless balanced droplet dispensing. In the experimental study, we verify the present chip successfully forms H358, H23, and A549 human lung cancer cell spheroids in the diameter range of 220μm∼3.2mm (uniformity>90%). In the spheroid culture test at...
A new type of dermal wound drug delivery device has been successfully fabricated and tested. It is powered by heat from the human body. There are three main parts to the device, the Knudsen pump, a reservoir and a bottom plate. The reservoir holds the drug until the device is placed on the skin of the patient. The heat from the skin travels through the device and powers the Knudsen pump. When powered,...
Three-dimensional hydrogel based cell culture has increased in prominence as a function of the in vivo-like phenotypes observed for cells cultured in this way. Unfortunately, cost and challenges in the physical manipulation of delicate hydrogel materials has impeded widespread use of these methods. Here we report the first digital microfluidic platform for the on-demand formation of hydrogel structures...
A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal...
This work presents miniaturized CMOS (complementary metal oxide semiconductor) impedimetric sensors for detection of avian influenza virus (AIV) in the femtomolar level. The sensing resolution is significantly enhanced owing to monolithic sensor integration to reduce the parasitic effect and the use of sub-μm interdigitated microelectrodes to promote signal coupling efficiency. The 4×4 sensor array...
We developed an interferometric optical micro-probe, for the purpose of non-contact measurement of distance-to-surface for samples in confined environments, such as holes and trenches whose lateral dimensions are in the order of hundreds of microns (typically fuel injection nozzles). A Michelson interferometer was integrated at the end of a 4mm-long, 390μm-thick, 550μm-wide cantilever, which incorporates...
Detecting the z-position of moving particles in an embedded microchannel is important but challenging in MEMS fields, hence this research describes a novel technique for detecting the z-position of moving objects utilizing chromatic aberration. With this simple and novel approach, the depth of moving object can be measured without delicate optical system. Results show that the developed system gives...
This study extends the authors' previous concept to employ nanoporous anodic aluminum oxide (np-AAO) as insulation and dielectric layer [1] to form the vertical-integrated inductive-capacitive proximity sensor. The advantages of this vertical-integrated inductive-capacitive proximity sensor are as follows, (1) enlarge the range of sensing distance: capacitive-sensing remains sensitive for short-distance...
This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging. These unreleased bulk acoustic resonators are driven capacitively using the thin gate dielectric of the CMOS process, and actively sensed with a Field Effect Transistor (FET) incorporated into the resonant body. FET sensing using...
This paper reports lead zirconate titatanate (PZT)-on-silicon electromechanical resonators with excellent, 50 Ω terminated, performances for RF applications. A low 2.14 dB insertion loss is demonstrated for a length extensional, PZT-on-2-μm-silicon 15 MHz resonator. A 22 dB return loss and maximum unloaded quality factor, QUL, max, of ∼540 in air resulted for this resonator. Similar performances with...
A two-port micromechanical beam resonator driven by its high stiffness locations has been used to enable a series-resonant resonator oscillator, for the first time, with enhanced power handling and phase noise performance as compared with the same resonator design but using low-stiffness driving configuration. The key to attaining better power handling capability relies on driving electrode arrangement...
This paper describes a “neural bypass” formed by hydrogel microfiber encapsulating neurons and glial cells. Using this bypass, we developed a technique to connect the separated neuronal regions without cell damage. We also demonstrated that a completely-transected cortical network was connected with the neural bypass. We believe that our neural bypass would be an extremely effective tool to connect...
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