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The tremendous technological convergence of microfabrication technology, wireless communication technology, and low-power circuitry has opened the possibility of widespread use of microfabricated implantable wireless microsystems. A typical operational mode for these microsystems is to transduce a physiological parameter relevant to a disease state of interest, and wirelessly communicate this parameter...
Periprosthetic joint infection (PJI) is difficult to treat and the incidence is between 1% and 2% in primary arthroplasties. Implant-associated infections usually arise via either primary infections from bacterial invasion at the time of implant surgery or secondary infections from hematogenous sources. The two-stage re-implantation protocol that consists of extensive debridement at the first stage...
We have designed, fabricated and characterized a cable-tie-type parylene cuff electrode for peripheral nerve interfaces, whose diameter is adjustable to accommodate the nerve properly during implantation. Cuffs made of thin and flexible parylene minimize mechanical damage to surrounding tissues after implantation. Moreover, the integrated parylene cable and pads facilitate the connection with external...
Surgeons make decisions on the use of different surgical tools providing a spectrum of contact forces to cut and manipulate tissue. These decisions are mostly made without quantitative data about the mechanical integrity and mechanical properties of the tissue. Here we report on an instrumented silicon tweezer for characterizing the electromechanical properties of tissue that is being tweezed by the...
This paper presented an approach for preparation of a highly-packed liposome assembly that implemented lipid bilayer-lipid bilayer contact at the interfaces to mimic a cell-cell connection on living tissues. Cell-sized liposomes were closely packed using our previous technique that allowed monodisperse liposomes arrayed on a substrate. We explored the lipid patterning conditions that would provide...
We present the fused-silica micromachined birdbath resonator gyroscope (μ-BRG) operating in the whole-angle (WA) mode. The key advantages of the whole angle mode operation is rotation angle measurement, large bandwidth, and full-scale range which is needed in detecting the motion of fast-moving objects. The μ-BRG is made with fused silica using a micro blow-torching process and has n = 2 wineglass...
This paper reports a new type of degenerate mode gyroscope with measured Q-factor of > 100,000 on both modes at a compact size of 1760 μm diameter. The toroidal ring gyroscope consists of an outer anchor ring, concentric rings nested inside the anchor ring and an electrode assembly at the inner core. Current implementation uses n = 3 wineglass mode, which is inherently robust to fabrication asymmetries...
This paper reports on the design, fabrication and characterization of single proof-mass tri-axial capacitive accelerometers coexisting in a low-pressure environment with high-frequency gyroscopes, for the implementation of monolithic 6-degree-of-freedom inertial measurement units. The accelerometers are designed to operate as quasi-static devices (i.e. non-resonant sensors) in mid vacuum levels (1–10...
This paper presents a novel “in operation acceleration sensing and compensation method” for a single-mass mode-matched MEMS gyroscope. In this method, the amplitudes of the sustained residual quadrature signals on the differential sense-mode electrodes are compared to measure the linear acceleration acting on the sense-axis of the gyroscope. By measuring the acceleration acting along the sense-axis,...
This work presents a static capacitive probe structure that enables quantitative characterization of the effective sidewall skew angle of the Silicon Deep-Reactive-Ion-Etching (DRIE) using static LCR prober at ambient environment. The design is capable of resolving sidewall skew angles around both in-plane axes independently and simultaneously with the same sensitivity. The measured distributions...
We report, for the first time, on the successful fabrication and operational characterization of electroplated Invar Micro-Hemispherical Shell Resonators (μHSR). The heat treatment of the samples and its effect on the quality factor (Q) of the resonators is studied. We show that thermal annealing shifts the coefficient of thermal expansion (CTE) of the alloy towards its minimum of ∼2ppm/°C, as a result...
This study exploits the two stage solidification technology to fabricate the isotropie/anisotropie magnetic polymer composites (MPC, polymer with magnetic particles). Multilayer magnetic isotropie/anisotropie MPC film can also be implemented using the two stage solidification process layer by layer. Merits of proposed technology: (1) material properties of magnetic-anisotropy MPC layer is realized...
Vertically aligned Carbon Nanotubes (CNT) arrays were successfully grown on top of a freestanding microhotplate, to investigate the thermal dissipation properties of CNT bundles and their applicability as heat exchanger. Two CNT configurations are employed: a group of six bundles, each with a diameter of 20 μm, and a single CNT bundle with a diameter of 200 μm. In both configurations the bundles are...
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