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This experimental study reports ESD behavior of novel designs of GaN Schottky diodes. Impact of electro-thermal transport, device degradation and trap generation on its ESD robustness is analyzed. Role of interface traps in ESD failure of GaN Schottky diode is investigated. Transition from sofit-to-hard failure, which is found to depend on diode area, presence of traps and diode design is discussed...
Using microwave-assisted synthesis in the solution medium, superparamagnetic, nanocrystalline cobalt ferrite thin films have been deposited on integrated inductors to increase inductance density. Cobalt ferrite thin films (CFTF), ∼820 nm thick, can be deposited in 10 min at ∼190°C, making the process CMOS-compatible. The as-prepared CFTF has a saturation magnetization (MS) of 238 emu/cc and coercivity...
Air-stable and area-selective doping strategies have eluded 2D materials and thus been a major bottleneck in realizing the plethora of semiconductor devices which require an built in electric field accessible from a p/n junction. Here, we demonstrate the possibility of p-doping through Vacancy Engineering, which unlike previous reports of molecular/substitutional doping is both area/dopant controllable...
A novel parallel plate capacitive tactile sensor design has been proposed which for the same deflection of the top electrode shows manifold improvement in sensitivity over present designs. Using a dielectric droplet leads to a simultaneous change in the capacitance area and gap leading to enhanced sensitivity. The proposed design is validated through modelling and experiments.
This experimental study reports ESD failure analysis of AlGaN/GaN HEMTs. Effect of MESA isolation, gate and parasitic MESA Schottky diode on ESD robustness is studied. Cause of snapback instability, multiple NDCs and transition from soft-to-hard failure are discussed. Unique leakage trends and cumulative nature of degradation are discovered. Post failure analysis reveals role of inverse piezoelectric...
This paper presents a novel handheld electrochemical workstation for serum albumin measurement. The system consists of a multi-path potentiostat module which performs electrochemical measurements on disposable test strip. The strip provides a port for applying blood sample. The test strip consists of 3 electrochemical cells for redundancy and parallel testing. The 3 sets of 3 electrodes (Working,...
In this paper we present a smart handheld system for point of care biosensors. The system consists of a novel multi-path potentiostat module which performs electrochemical measurements on disposable test strip. The strip provides a port for applying bio-sample such as blood or urine. The analyte port on the disposable strip is designed with 3 sets of 3 electrodes (Working, Reference and Counter electrodes)...
Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO3-CuO on Ag-doped BaTiO3-CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped...
Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment...
Metal-insulator-metal (MIM) capacitors for DRAM applications have been realised using stacked TiO2-ZrO2(TiO2/ZrO2 and ZrO2/TiO2) and Si-doped ZrO2 (TiO2/Si-doped ZrO2) dielectrics. High capacitance densities (> 42 fF/ μm2), low leakage current densities (< 5×10−7A/cm2 at −1 V), and sub-nm EOT (< 0.8 nm) have been achieved. The effects of constant voltage stress on the device characteristics...
We report on a cost effective, portable urban air pollution monitoring device, Envirobat, based on commercially available gas sensors. In order to carry out air pollution monitoring over an extensively large area, the device integrates inexpensive solid state sensors, along with GSM Module which transmits measured data at multiple ground sites to a centralized server through GPRS. This device facilitates...
This paper presents our work on developing an automated micropositioner and a low cost disposable dispenser module having a disposable dispenser core. The dispenser core is made up of Polydimethylsiloxane (PDMS). Once the user specifies the dispensing location in the Graphical User Interface (GUI), the movement of the micropositioner is automatic. The design, fabrication and characterization results...
Ag doped BaTiO3-CuO mixed oxide thin films are evaluated for their carbon-dioxide sensing characteristics. The metal oxide films of different thicknesses are deposited on oxidized p type Si <100> substrate by RF Sputtering. Sensing characteristics for different CO2 concentration, (300 ppm – 1000 ppm) are obtained for different operating temperatures, (100° C – 400° C). Optimum temperature for...
A comprehensive design flow is proposed for the design of Micro Electro Mechanical Systems that are fabricated using SO Mumps process. Many of the designers typically do not model the temperature dependency of electrical conductivity, thermal conductivity and convection coefficient, as it is very cumbersome to create/incorporate the same in the existing FEM simulators. Capturing these dependencies...
In-situ impedance spectroscopy of layer-by-layer self-assembly of weak polyelectrolytes is presented. Interdigitated capacitors with active area of 1×1 mm2 and electrode spacing of 5 µm are fabricated and used for this purpose. Measurement results indicate that the impedance decreases with increase in number of polyelectrolyte layers. About 2.5% of relative change in magnitude of impedance at 104...
BaTiO3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO2, at an operating...
In this study, we have employed e-beam evaporation technique to evaluate the effect of O2 flow rate during evaporation on HfO2 films grown on Silicon substrates. We report the influence of oxygen flow rate on 32–40nm HfO2 films, by characterizing the chemical and electrical properties. It has been demonstrated that the films deposited at 3 SCCM O2 flow rate show better compositional and electrical...
We present a method for fabricating ultrahigh density floating gate devices using highly ordered 2D arrays of gold nanoparticles (8×1011 particles/cm2) as the charge storage nodes. The removal of polystyrene ligands, after array formation, was essential for obtaining reliable memory window. Surprisingly, the memory window of devices using arrays with 4 nm spacing was found to be larger than that of...
Metal-insulator-metal (MIM) capacitors have been fabricated with single dielectric stack (Gd2O3) and bilayer dielectric stacks of Eu2O3 and Gd2O3 (Gd2O3/Eu2O3 and Eu2O3/Gd2O3) for analog and DRAM applications. While Pt/Gd2O3/Pt capacitors provide the highest capacitance density (15 fF/µm2), Pt/Gd2O3/Eu2O3/Pt and Pt/Eu2O3/Gd2O3/Pt capacitors provide lower leakage current densities (1.2×10−5 A/cm2 and...
The Micro and Nano Characterization Facility (MNCF) located in Centre for Nano Science and Engineering (CeNSE) building on the Indian Institute of Science (IISc, Bangalore, INDIA) campus is a centralized facility for characterization of Micro and Nano Devices. The National Nanofabrication Centre (NNFC) which is 10,000 sq. ft. of clean room housing state of the art equipment for nanofabrication is...
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