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Based on the theory of superhydrophobicity for low surface energy coatings, we describe a superhydrophobic antistiction silica coating for MEMS devices. The process uses a novel sol-gel process sequence with a eutectic liquid as a templating agent. The eutectic liquid displays negligible vapor pressure and very low melting point (12degC at ambient conditions) to reduce solvent loss during the high...
Based on the theory of superhydrophobicity for low surface energy coatings, we describe a superhydrophobic antistiction silica coating for MEMS devices. The process uses a novel sol-gel process sequence with a eutectic liquid as a templating agent. The eutectic liquid displays negligible vapor pressure and very low melting point (12degC at ambient conditions) to reduce solvent loss during the high...
In this paper, the novel biocompatible materials were created on the basis of creation of the bio-inert superhydrophobic surfaces using a heat curable polydimethylsiloxane (PDMS, Sylgard 184, a product of Dow Corning) and polytetrafluoroethylene (PTFE) particles. The incorporation of PTFE nanoparticles in the PDMS matrix allows the formulation of superhydrophobic films with contact angles of ~160deg...
This paper presents a novel method to prepare inorganic superhydrophobic silica coatings for microelectro-mechanical systems (MEMS) packaging using sol-gel processing with tetramethoxysilane and isobutyl-trimethoxysilane as precursors. Incorporation of isobutyl-trimethoxysilane into silica causes hydrophobic isobutyl groups to be present on the surface, thus generating surface hydrophobicity. The...
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