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The galvanic corrosion induced failures have been investigated for three cases in PCB, TFT touch screen and wire bonding industries using comprehensive physical and chemical characterization methods. Obvious evidences of anode oxidation and corrosive ions were found for all three cases. Characterization methodology should be tailored based on different situations.
Transmission EBSD is used to analyze aluminum metal layer and GaAs/AlAs epitaxial layers, both are very common in semiconductor industries. Transmission EBSD shows a lateral spatial resolution about 20 nm and successfully reveals to features less than 100 nm in these samples.