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In this paper a new way of increasing the enclosed air volume between the stator and the membrane of an electrostatic loudspeaker is introduced. Instead of using a thicker sacrificial layer, a stress-induced self-raising of the stator is utilized. Corrugation grooves in combination with highly tensile silicon nitride rings are causing a deflection of the stator after the release etch. For a stator...
The need for computer modeling tools capable of precisely simulating multi-field interactions is increasing. The accurate modeling of an electrostatically actuated Micro-Electro-Mechanical-Systems speaker results in a system of coupled partial differential equations (PDEs), describing the interactions between electrostatic, mechanical and acoustic fields. A finite element (FE) method is applied to...
The market for tablets, laptops and mobile devices is increasing rapidly. Device housings get thinner and energy efficiency plays a major role for battery-powered devices. Microelectromechanical (MEMS) loudspeakers, fabricated in complementary metal oxide semiconductor (CMOS) compatible technology merge energy efficient driving technology with cost economical fabrication processes. Fabricating these...
This paper introduces a way to increase the airgap of a capacitive MEMS sensor or actuator. Usually, a thicker sacrificial layer composed of silicon dioxide is used to increase the distance between two parallel plates. In our case, both poly-silicon planes are being produced with a small gap filled with silicon dioxide. Corrugation grooves lined with highly tensile silicon nitride cause a stress induced...
Silicon microphones are already common in mobile applications and offer several advantages compared to conventional systems. In this paper a possibility is examined to use microphones also as electrostatically driven loudspeakers. The potential of these devices is demonstrated and the challenges to perform as speaker are discussed.
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