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Micro-cantilevers and double-supported micro-beams with piezo-resistors provide sensitive force measurement. The cantilevers/beams embedded in organic material like epoxy become tiny tactile sensors which measure not only normal force but also shear force. The fabrication process and the performance of the sensors are shown in this report. Finally, the sensor is applied to a robotic hand.
This Symposium is a follow??up to the very successful issues held in 1999 and 2000 in Paris and in 2001, 2002 and 2003 in Mandelieu-La Napoule, in 2004 and 2005 in Montreux, Switzerland in 2006, in 2007 in Stresa, Italy, in 2008 in Nice, France, in 2009 in Rome, Italy, in 2010 in Seville, Spain, in 2011 in Aix??en??Provence, France and in 2012 in Cannes, France. This series of Symposia is a unique...
The field of metamaterials is only a dozen years old, yet the discovery of new phenomena and applications within the field are burgeoning: lenses that focus subdiffractive images with infinite depth of focus, materials through which acoustic or electromagnetic waves travel “backward,” invisibility cloaks, materials through which electromagnetic waves “tunnel”, materials with macroscopic quantum effects,...
A novel design for high-G capacitive MEMS accelerometers that allows for a critically damped dynamical response is presented. The high damping condition is achieved by reducing the mass while keeping a high rigidity of the sensor through a lattice-like mechanical structure. Compared to previously proposed solutions, this design allows for smaller and more reliable sensors.
The last half-century was transformed by the electronic revolution that essentially reproduced the human brain and its computing capacity on a chip. But over time, scientists have realized that something was missing to give life, so to speak, to the small chip with a brain: one needed to awaken its senses and develop its muscles! This challenge was solved through Micro Electro Mechanical Systems (MEMS)...
Sample preconcentration is an important step to increase the accuracy of further detection, especially for the sample with extreme low concentration. Due to the overlapping of the electrical double layers in the nanochannel, the concentration polarization effect could be generated while applying an electric field. Therefore, a nonlinear electrokinetic flow is induced, which results in fast accumulation...
In this work, modulation-doped AlGaAs/InGaAs micromachined thermopile-based infrared (IR) sensor is reported. The key features of the IR sensors are the incorporation of high mobility — modulation-doped AlGaAs/InGaAs heterostructure and a multi-layer Cr2O3 absorber combined with the surface bulk micromachined device structure to achieve high sensing performance. A responsivity of ~3000 V/W and a relative...
The aim of this work is to model accurately the DRIE Bosch process used for the MEMS components fabrication. This modelling will permit, depending on the design, to obtain a 3D visualization of the substrate after etching and therefore foresee the real MEMS profile. Another objective is to determine, depending on the modelling accuracy, some process parameters which have been used on the etching equipment...
We propose a CO2 gas sensor based on an impedance change of ionic gel (IG) according to the CO2 gas concentration. The sensor consists of an IG film patterned on electrodes. The impedance of the IG changes when the IG absorbs CO2 gas. CO2 gas concentration can be detected by measuring the amount of impedance change. Our proposal sensor has a merit that power consumption is very low (<1μW). It is...
In this study, we investigated a simple glucose biosensor based on a 3D gold nanostructure modified screen-printed electrode. The 3D gold nanostructure was electrochemically fabricated on the working electrode of a commercially available screen-printed electrode using an aqua regia dissolved bulk gold solution as the precursor. Potassium ferricyanide and glucose oxidase were then sequentially coated...
TSV (Through Silicon Via) technology has been employed on packaging for CIS (CMOS Image Sensor) chips for many years. To assess the reliability behavior of a typical TSV design for CIS chips, the temperature humidity cycling tests (THCT) have been performed on self designed TSV samples but without current bias. Since the current bias lead electromigration effects which are not neglect-able in actual...
The aim of this work is to model a novel tuneable RF capacitor based on a gyroscope-like complex geometry using a new design platform based on component library MEMS+. This modelling approach allows detailed and accurate device simulation as well as rapid system-level simulation through an automatic transfer into general system software, namely Matlab/Simulink.
This paper presents the design of a monolithic 3-axis thermal accelerometer using a standard CMOS process. Based on free convection in a sealed cavity, the sensing principle is well known and many examples of single and dual-axis MEMS accelerometers can be found in the literature. More recently, Finite Element Modeling has demonstrated the feasibility of a fully integrated 3-axis sensor manufactured...
Nonlinear energy generators are considered as an effective way to overcome the shortcut of narrow band of linear generators. Among them, bistable oscillators are especially of great potential. Many are realized with magnets and so are not well suited for miniaturization. This paper presents a novel bistable piezoelectric energy harvesting architecture without magnets. Modeling and design have been...
Silicon microphones are already common in mobile applications and offer several advantages compared to conventional systems. In this paper a possibility is examined to use microphones also as electrostatically driven loudspeakers. The potential of these devices is demonstrated and the challenges to perform as speaker are discussed.
This paper is an extension of a previously published work concerning a novel approach for the design of RF MEMS switches in coplanar waveguide (CPW) configuration. The peculiarity of the method is to allow imposing the matching condition directly in analytic form. This result is obtained using the image parameter representation for the modeling of the device. Standard commercial simulators are used...
This paper presents the integration and the assembly of MEMS sensor with RF-IC and flexible RF-antenna, which is expected for the production of super compact and maintenance-free wireless sensor nodes for applications in ‘green’ sensor networks, e.g. environmental monitoring, electric power consumption controlling. To reduce its size to the lowest possibility, structure and layout of the sensor node...
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