The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
The research was to develop a variable focus liquid lens module with a direct current electromagnetic driving. The variable focus lens module consists of a sandwich like structure and an electromagnetic driving device. The module was composed by three acrylic plates by milling machine and coated PDMS film as a fluidic chamber. Three acrylic plates were clipped the PDMS membrane and attached two magnets...
We propose a CO2 gas sensor based on an impedance change of ionic gel (IG) according to the CO2 gas concentration. The sensor consists of an IG film patterned on electrodes. The impedance of the IG changes when the IG absorbs CO2 gas. CO2 gas concentration can be detected by measuring the amount of impedance change. Our proposal sensor has a merit that power consumption is very low (<1μW). It is...
In this study, we investigated a simple glucose biosensor based on a 3D gold nanostructure modified screen-printed electrode. The 3D gold nanostructure was electrochemically fabricated on the working electrode of a commercially available screen-printed electrode using an aqua regia dissolved bulk gold solution as the precursor. Potassium ferricyanide and glucose oxidase were then sequentially coated...
Microelectromechanical systems production is still an immature technology compared to the classical semiconductor industry. MEMS fabrication and packaging processes may present misalignments which result in an improper placement of the internal microstructures or dies. In this work, the possibilities of diagnosing mechanical misalignments of dual axis IC accelerometers are explored. The used method...
TSV (Through Silicon Via) technology has been employed on packaging for CIS (CMOS Image Sensor) chips for many years. To assess the reliability behavior of a typical TSV design for CIS chips, the temperature humidity cycling tests (THCT) have been performed on self designed TSV samples but without current bias. Since the current bias lead electromigration effects which are not neglect-able in actual...
Micro-cantilevers and double-supported micro-beams with piezo-resistors provide sensitive force measurement. The cantilevers/beams embedded in organic material like epoxy become tiny tactile sensors which measure not only normal force but also shear force. The fabrication process and the performance of the sensors are shown in this report. Finally, the sensor is applied to a robotic hand.
The aim of this work is to model a novel tuneable RF capacitor based on a gyroscope-like complex geometry using a new design platform based on component library MEMS+. This modelling approach allows detailed and accurate device simulation as well as rapid system-level simulation through an automatic transfer into general system software, namely Matlab/Simulink.
This paper presents the design of a monolithic 3-axis thermal accelerometer using a standard CMOS process. Based on free convection in a sealed cavity, the sensing principle is well known and many examples of single and dual-axis MEMS accelerometers can be found in the literature. More recently, Finite Element Modeling has demonstrated the feasibility of a fully integrated 3-axis sensor manufactured...
In recent years, there was much interest for Anodized Aluminum Oxide studies for their utilizations applied in nanotechnology and electronic fields. In fact, Anodized Aluminum Oxide (AAO) grows under various acid or basic electrolytes. This growth is done on different substrates as aluminum foil or silicon, glass, and plastic with aluminum thin film deposit. In previous work, we have demonstrated...
We propose the active control of effective stiffness, damping, and mass of MEMS by applying feedback forces that are proportional to displacement, velocity, and acceleration of its proof mass. Such control in performance is important due to the systemic variation in performance caused by process variations, packaging stresses, thermal drift, energy losses, and noise sources. Prior efforts by others...
Recently, the use of Sn-Pb eutectic solder has been prohibited by Restriction of the use of Hazardous Substances (RoHS), since Pb may have a bad influence on human and the environment. Instead, Tin-Silver-Copper (Sn-Ag-Cu) system is adopted as the lead free solder. However, the melting temperature of Sn-Ag-Cu is higher than that of Sn-Pb, which may induce damages in the circuit boards and packages...
This paper presents sensitivity behavior study and optimization of dual axis CMOS MEMS convective accelerometers using both analytical and FEM techniques. In a first part, newly developed accelerometer 3D model is used in FEM simulations. Using different sizes for micromachined and square cover shapes, it is found that sensitivity readings and its maximum position in cavity are affected by both cover...
A novel design for high-G capacitive MEMS accelerometers that allows for a critically damped dynamical response is presented. The high damping condition is achieved by reducing the mass while keeping a high rigidity of the sensor through a lattice-like mechanical structure. Compared to previously proposed solutions, this design allows for smaller and more reliable sensors.
Nonlinear energy generators are considered as an effective way to overcome the shortcut of narrow band of linear generators. Among them, bistable oscillators are especially of great potential. Many are realized with magnets and so are not well suited for miniaturization. This paper presents a novel bistable piezoelectric energy harvesting architecture without magnets. Modeling and design have been...
The design, fabrication, and test results of a multi-channel integrated readout circuit (MIROC) mixed-signal ASIC for low capacitance (<10pF) solid state sensors arrays are presented in this publication. The chip, fabricated in IBM 0.18 μm 7WL SiGe BiCMOS technology and measuring 4 × 4 mm, contains nineteen analog amplifier channels with pulse-shaping and peak-and-hold detection, three on-chip...
This work reports on RF MEMS chip capping to protect sensitive devices by quartz caps having a cavity to enclose MEMS devices and an epoxy dry film polymer as a sealing ring. The fabrication process for both die-to-die and wafer-to-wafer 0-level capping is presented. Good adhesion of caps to the substrate is demonstrated by shear tests, while RF measurements on CPW lines indicate a negligible insertion...
This work presents a low power low- and high-voltage IC design of an asynchronous conditioning circuit assisting the capacitive vibration energy harvester. The proposed IC implements a sensing and control electronics featuring an auto-calibration concept, which allows the harvester to adapt to the environmental fluctuations. For the first time such a system is designed to operate at high voltage (up...
A novel micro-electro-mechanical (MEMS) multiparametric biosensor system based on living cells is presented. The biosensor system includes two biosensing techniques; resonant frequency measurements and electric cell-substrate impedance sensing (ECIS) on a single device. The multiparametric sensor system integrates uses the upper electrode of a quartz crystal microbalance (QCM) resonator and as working...
A novel micro-electro-mechanical (MEMS) multiparametric biosensor system based on living cells is presented. The biosensor system includes two biosensing techniques; resonant frequency measurements and electric cell-substrate impedance sensing (ECIS) on a single device. The multiparametric sensor system integrates uses the upper electrode of a quartz crystal microbalance (QCM) resonator and as working...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.