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This paper reports a unified fabrication process used to build multiple Aluminum Nitride (AlN) based micro-electromechanical system (MEMS) sensors on a single chip. A fully functional AlN-based sensor cluster has been demonstrated and is presented in this paper. This sensor cluster is a “five degree-of-freedom” cluster; it measures 3-axis acceleration, temperature and pressure fabricated on a 1 cm...
Presented is a single-cell analyser to measure cytoplasmic components in large cell populations. This technology, flow-lysometry, uses a flowcell that performs three functions (cell detection, cell lysis and component sensing) in a continuous microfluidic channel. This flow-cell can be coupled and synchronised with classical flowcytometry, thus offering high-throughput measurements of various cytoplasmic...
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically...
This paper reports on the design, fabrication and testing of novel one and two port piezoelectric contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form filterbanks. The paper offers a comparison of one and two port resonant devices exhibiting frequencies ranging from 80 to 800 MHz, quality factors from 1,000 to...
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically...
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