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This paper presents the development of an implantable wireless sensor node for bio-logical information monitoring of animals. Power consumption was evaluated and then decreased dramatically by improving the efficiency of the MCU, which enables >4 months lifetime when using CR1220 battery for body temperature monitoring. Various configuration of the antenna were investigated for the pursuit of small...
This paper presents the integration and the assembly of MEMS sensor with RF-IC and flexible RF-antenna, which is expected for the production of super compact and maintenance-free wireless sensor nodes for applications in ‘green’ sensor networks, e.g. environmental monitoring, electric power consumption controlling. To reduce its size to the lowest possibility, structure and layout of the sensor node...
The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power...
The present study describes the MEMS-based piezoelectric switch to activate the event-driven wireless sensor node for chicken health monitoring system. We have fabricated the switch composed of “S” shaped piezoelectric cantilever and proof mass, where the resonance is 24 Hz. When the switch has been vibrated at 4, 6, 8, and 12 Hz, which is close to the chicken movement frequency, the input vibration...
In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality...
This paper presents prototypes of wireless sensor nodes and network system for monitoring the power consumption of information and communication devices. Nowadays, carbon dioxide (CO2) emission in the information and communication technology (ICT) field is increasing enormously due to the high electric power consumption in ICT devices, e.g., in Internet data centers (IDC) as well as offices and homes...
We have developed the digital output piezoelectric accelerometer using CMOS-compatible AlN thin films. The AlN thin films were deposited by sputtering. The multilayer of Pt/Ti/AlN/Pt/Ti/SiO2 has been fabricated into the piezoelectric accelerometers, where the patterned AlN thin films are arrayed in parallel and electrically connected in series. The sensitivity of the fabricated accelerometer reaches...
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