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We report design, fabrication and characterization of a MEMS-based tunable flexible photonic crystal, which is comprised of a periodic array of 290 nm diameter high-index (3.46) silicon rod embedded in a low-index (1.56) SU-8. A couple of chevron electro-thermal actuators are attached to the flexible photonic crystal and tunability is achieved by mechanical force generated by the actuators. The mechanical...
This paper presents a real-time observation on microstructure evolution under electrical programming pulses directly on phase-change memory cells developed with 90-nm technology for the first time. The feasibility of this in-situ TEM experiment was successfully confirmed through the observed memory-switching behavior, and it was found that slow quenching crystallization enhanced the grain growth rather...
In the 21st century, the robot is rapidly emerging in the general public. In particular, the intelligent robot will play important roles in the future by strengthening the global competitiveness. In this paper, strategies to improve the utilization of the intelligent robot were investigated using a Structural Equation Model (SEM). The relation among various factors that have a potential influence...
HRTEM observation was conducted to find evidence of physical degradation in AlGaN/GaN heterostructure HEMT devices after life time testing. A strong relationship between electrical degradation and defects formation near the gate edge was observed. Detailed features of physical damages correlated with the degradation mechanism were discussed.
We have developed a compact and stable fiber optic Mach-Zehnder interferometer (MZI) using hollow optical fiber (HOF) spliced between standard single mode fibers. The use of a micro-sized air hole in HOF is to provide two optical guidance/propagation paths and temperature sensitivity of 52 pm/degC and dynamic range of 10 dB are obtained over the range of 25degC to 330degC at 1550 nm.
We investigated carbon nanotube field effect transistors (CNT FET) utilizing semiconducting single-walled carbon nanotubes (SWCNTs). Multiple devices, each of different metal source and drain contacts, were fabricated on long (~11 micron) SWCNT. Large contact resistances around four MOmega were observed at room temperature. Low temperature measurements yielded varying contact resistances for these...
We evaluated the electrical properties and change of nanostructure of Cu doped SiO2 and Ge2Sb2Te5 (GST) thin film under electrical stressing. Specialized scanning tunneling microscopy (STM)-transmission electron microscope (TEM) holder, which allows us to do the electrical characterization and observation of in-situ nano-structural evolution simultaneously, used as a approach method to confirm the...
We demonstrate, for the first time, a HfLaSiON/metal gate stack that concurrently achieves the following: low threshold voltage (VT =0.33V), low equivalent oxide thickness (EOT=0.91nm) (Tinv =1.3nm) and 83% SiO2 mobility. Key enablers of this result are 1) La doped HfSiON for n-FET VT tuning 2) HfO2:SiO2 alloy ratio with 10% SiO2 suppressing crystallization up to 1070degC, 3) interlayer SiO2 (IL)...
A novel method for bonding sapphire, LiNbO3, quartz and glass wafers with silicon using the modified surface activated bonding (SAB) method is described. In this method, the mating surfaces were cleaned and nano-adhesion Fe layers were deposited using a low energy argon ion beam simultaneously. The optical images show that the entire area of 4-inch wafers of LiNbO3/Si was bonded. Such images for other...
We show an ALD based HfSiON gate dielectric scaled to 1 nm EOT with excellent performance and reliability. Furthermore, the HfSiON dielectric films are integrated in a gate first approach that includes a 1000degC-5s anneal. It is also demonstrated that this 1 nm EOT HfSiON can achieve electron and hole mobilities comparable to that of SiON. This progress is enabled due to better understanding of the...
Fabrication of surface relief grating on the top of optical fiber core and its characterization are reported. Azo-polymer thin film layer on the surface has been patterned interferometrically to form one- and two-dimensional gratings. Diffracted beam pattern has been characterized.
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