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A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). A MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was then micro-fabricated for preliminarily examination (DTIP 2012). A novel oscillating...
This paper reports a novel method for passive DC current sensing without using a cord separator. In this method, a piezoelectric thin-film cantilever with a micro-magnet on its end is positioned near a power cord. The DC current in the power cord induces a magnetic field, which generates a magnetic force acting on the micro-magnet. Consequently, the piezoelectric cantilever is bent and induces an...
A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current...
A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was first proposed in our previous work (DTD? 2011). A MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was then micro-fabricated for preliminarily examination (DTD? 2012). Recently,...
A “crescent-shaped” binding alignment mark, more applicable to the self-alignment than reported “tear-drop/elliptical hole” pattern, was designed and comparatively studied with other possible alignment marks by introducing the overlap ratio analysis (DTIP 2011). Recently, in order to apply this novel design to micro-parts with positive and negative poles on the binding sites, a modified “crescent-shaped”...
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point...
A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). Recently, a MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was micro-fabricated for preliminarily examination (DTIP 2012). Different from...
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. This study seeks to enhance the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results have been discussed from view point of vibration...
A novel oscillation system, consisting of an opposite C-shaped cantilever and a beam-shaped cantilever, has been newly designed, preliminarily fabricated and characterized for synchronized oscillation-based ultimate sensing applications. Two geometrically different cantilevers, with resonant frequencies of 300.76 kHz (detecting) and 149.77 kHz (sensing), are coupled by two coupling overhangs as micromechanical...
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