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The study of creep in MEMS is crucial for their lifetime prediction and reliability evaluation. The experimental approaches used in macromechanics can be extended to the microscale if their effectiveness is proved by dedicated experiments. This goal may provide more general validity of creep effects prediction in MEMS, instead of spotted experiments on single devices like those ones reported in most...
This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential...
A small autonomous device integrating MEMS, CMOS and photovoltaic (PV) cells has many attractive applications. For such a device, using light as a power source is preferable because power feeding and control signal transmitting can be done at the same time and in a remote manner. We demonstrated the remote power feeding to a MEMS actuator by light using PV cell array. In this article, we first proposed...
This article describes the first developments of a microfluidic circuit for the continuous generation of monodisperse polymersomes. The generation of these vesicles is made in a consecutive flow focusing cross-junctions structure from non miscible fluids. The device allows generating a stream of polymersomes in two steps. The breaking of a focused water flow creates first water droplets in a solution...
We present an extensive study on dielectric charging effects, one of the major problems that limit the reliability of electrostatically actuated RF-MEMS switches and, thus, their way into a broad commercial application. For the first time, we are able to provide quantitative statements on the amount of charge injected into the dielectric layers. They result from monitoring the long-term evolution...
Resonant Piezoelectric-excited Millimeter-sized Cantilevers (PEMC), has attracted many researchers' interests in the applications such as liquid level and density sensing. As in these applications, the PEMC are partially immersed in liquid, an appropriate analytical model is needed to predict the dynamic behavior of these devices. In this work, a PEMC has been designed and fabricated for liquid level...
In this article a method is presented for the calculation of structural and thermal parameters from thermal transient measurement results in order to be used as input data for thermal stress simulation. It is shown how the geometry of the internal structure of the package and the temperature distribution can be approximated from the thermal response function measured after switching on a heating element...
The strength of poly-silicon membranes was investigated by experimental tests and numerical simulations. A new fracture test has been developed that replicates the loading situation under real service conditions well but with higher stress level. A set of 45 membranes was tested at each of the three positions on the wafer in order to assure statistical accuracy and to evaluate the strength distribution...
A novel technique for fabrication of capacitive pressure sensor was conceived and implemented using press-on-contact in silicon-to-glass anodic bonding process. The novelty of the design lies in using a glass plate (Corning®7740) having through holes and metallization pattern for anodic bonding process. This enables the formation of press-on-contact between metal patterns on Si-sensor wafer and the...
Three-dimensional (3D) integration of MEMS and ICs enables improvements in device performance, and often requires through-silicon vias (TSVs). TSV technologies presently available for micro electromechanical systems (MEMS) either have completely filled vias or hollow vias. Hollow vias imply perforated wafers, and limit further processing options. We have investigated dry film resist which enables...
High-power LED lamp is developing in the recent year for energy saving. However, the issue of heat dissipation on LED chip still needs to solve. The heat generation is increased with the power of LED, which reduce the life cycle of LED. LED lamp configuration design influences on dissipating heat from chip since LED array is enclosed by plastic, and surrounds with stationary air. The LED lamp manufactures...
In this study, the robustness of a wafer-level testing algorithm was analyzed and the Taguchi methods were used to perform variability analysis on the effects of differences in test key structural length (ΔL), material crystal direction, and structural length on the Young's modulus (E) and mean stress (σ0) of thin films. The results of this study indicate that structural length difference is the most...
We present an accurate 3D reconstruction method for silicon micro/nanostructures with high aspect ratio, that was developed and implemented using a dual beam (Focused ion beam and scanning electron microscopy (FIB-SEM)) tomography. Black Silicon (BSi) samples were processed by alternating steps of FIB etching and SEM imaging, that allow obtaining sequential cross section images of the sample, including...
High temperature silicon direct (fusion) wafer bonding is a process with many application areas. Depending on the application, perfect insulation or zero resistance across the bonded interface is desired, but high bond strength is needed in both cases. Recently, we have presented a hydrophilic bonding process which resulted in ohmic behaviour and negligible electrical resistance of the bonding interface...
In this paper, we report a non-invasive and nondestructive probing method for analyzing the MG63 osteoblast-like cells. High-frequency Microwave atomic force microscope (M-AFM) can sense the topography and microwave image of MG63 cells simultaneously in one scanning process. Under the frequency modulation (FM) AFM mode, this powerful instrument is applied successfully to create a microwave image of...
We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric...
Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact...
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