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This manuscript reports the application of carbon nanotube (CNT) circuits as visible light sensors. The CNT circuits are made of vertically aligned multiwalled CNT (MWCNT) forests, with electrodes covered by silver paste, thus the electron conduction between electrodes was dominated by the intertube conduction. The linear current-voltage curves of these CNT circuits reveals typical circuit resistivity...
Horizontally aligned carbon nanotubes (HACNTs) were grown from designated trench sidewalls in silicon substrate with chemical vapor deposition (CVD) system. The silicon trenches were fabricated with microelectromechanical system (MEMS) technology, and Fe catalysts were deposited onto the selected trench sidewalls by tilt angle electron beam evaporation. Characterizations of the as-grown CNTs were...
In this paper, we present a new method of using functionalized multi-walled carbon nanotubes (MWCNTs) to specifically detect anti-goat IgG. 3-Glycidoxypropyl-trimethoxysilane (GPTS) was immobilized onto the CNT surface to introduce epoxy ring and goat IgG was used as a biological probe. Afterwards, blockers were used to occupy the open space in the CNT surface, and finally anti-goat IgGs were detected...
In this article, a systematic study was conducted to understand the influences of various synthesis parameters, such as catalyst thickness, catalyst pretreatment time, growth time, reaction gas flow rate, growth temperature, and pressure on the length and quality of carbon nanotubes (CNT) grown by thermal chemical vapor deposition (TCVD). CNT grown on iron deposited silicon oxide substrates were characterized...
A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin film microheater array were conducted. The infrared image of the fabricated microheater device confirmed the simulation results. Based on these simulations, a microheater array was fabricated on Si/SiO2 substrate, and carbon nanotube bundles were grown locally at a temperature of above 650??C while the temperatures...
This work presents a novel synthesis process for locally growing carbon nanotubes on specific surface area using micro-machined heaters in a room temperature quartz tube. The temperature difference between the heating area (~600 degC) and the bulk silicon substrate (200 degC) is about 400 degC. Therefore, this process is compatible with on-chip microelectronics. The detailed micro-heater fabrication...
In this paper, through-wafer interconnects using carbon nanotube bundles grown by thermal chemical vapor deposition have been reported. The authors have demonstrated a reliable process of synthesizing aligned carbon nanotube bundles through two bonded silicon wafers. The top wafer (100 mum thick) with patterned through-holes allows carbon nanotubes to grow vertically from the catalyst layer (Fe) on...
The transmission line behavior of a proposed CNT-based coaxial vertical interconnect scheme is studied while a nanotransmission line model for the CNT interconnect scheme is also proposed. Using copper as a benchmark, a transmission line performance evaluation is carried out, which considers the size and skin effects on its electrical resistivity. As a feature of 1D systems, the total inductance of...
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