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Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5×3 μm2, an air gap of 60 nm and is coated with amorphous carbon (a-C)...
This paper reports an amorphous carbon (a-C) contact coating for ultra-low-power curved nanoelectromechanical (NEM) switches. a-C addresses important problems in miniaturization and low-power operation of mechanical relays: i) the surface energy is lower than that of metals, ii) active formation of highly localized a-C conducting filaments offers a way to form nanoscale contacts, and iii) high reliability...
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