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This paper introduces a ‘high-frequency’ resonant tri-axial tuning fork gyroscope (TFG) with a single-drive mode of operation. The quad-mass device is implemented on a 2×2 mm2 vacuum-packaged die fabricated using the epi-seal process, making this one of the smallest wafer-level packaged 3-axis gyros. In contrast to conventional resonant TFGs, the resonant frequencies are designed to be relatively...
A biological measurement microsystem enables precision protein assays by compartmentalization of biosensors in a sensor array. Using a PDMS microfluidic interface on an 8 by 8 Giant Magnetoresistive sensor array, this compartmentalization technique performs all required measurements, including biological references, on a single sensor chip alongside the actual sample(s) to be measured. All data is...
We present a technique for direct estimation of the conservative and dissipative nonlinearities of symmetric MEMS resonators. The technique is based on measuring the ring-down response, during which the nonlinearities result in an amplitude-dependent frequency and non-exponential decay. Here we show how analysis of the amplitude and phase of the ring-down response allows one to estimate conservative...
This paper reports fabrication and preliminary test results of oxide-coated polysilicon disk resonator gyroscopes (DRG) in a wafer-scale encapsulation. With this thin oxide coating, surface roughness of a fully encapsulated device was reduced by 10x, increasing the uniformity across the wafer. We also demonstrate the effects of oxide coating on key performance parameters of resonant-based sensors...
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors...
This paper investigates the impact of operating a vibratory rate gyro (VRG) at large oscillation amplitude where the VRG's driven axis behaves like a nonlinear oscillator, described by the Duffing equation. Although open-loop resonators operating above a critical amplitude exhibit catastrophic jump instabilities, we demonstrate that through closed-loop operation, the drive axis can be stably operated...
The geometry of a MEMS tuning fork resonator was optimized using a bio-inspired binary particle swarm optimization (BPSO) technique in order to reduce energy dissipation from thermoelastic dissipation (TED). The optimization technique combines fundamental physics with bio-inspired algorithms to navigate the complicated design space that arises from multiphysical problems. Fully-coupled thermomechanical...
The outbreak of the severe acute respiratory syndrome (SARS) in 2003 has ignited studies and research (and even the general public interest) in the field of infrared (IR) imaging systems for blind mass human fever screening to control the spread of the pandemic. The ideal device for blind mass fever screening should be speedy, noninvasive, and able to accurately detect people with fever. IR thermography...
Resistive contacts in multilayer interconnects have been an ongoing challenge for semiconductor industries. The failing mechanisms behind them were difficult to uncover, which made it necessary to initiate deeper research into each issue that we managed to isolate. The traditional approach of using passive voltage contrast (PVC), scanning electron microscope (SEM), or focused ion beam (FIB) [1] to...
Resistive contacts and, in particular, resistive gate contacts in multilayer interconnects have been an ongoing challenge for semiconductor industries. The failing mechanisms behind them were difficult to uncover, which made it necessary to initiate deeper research into each issue that we managed to isolate. The traditional approach of using passive voltage contrast (PVC), scanning electron microscope...
In this paper, we use the continuous- time PH/M/n/m preemptive priority queue to model the traffic behaviour between the ISP and a future HAN. From the simulated results of the model, one can then approximate the amount of bandwidth required for each traffic class per household so that the total bandwidth required is minimized while the QoS requirements (delay and blocking probability) of the home...
Light weight, miniature spaceborne parametric and transistor low noise amplifiers (LNA's) have been developed for TRW and Western Union for use in NASA's Tracking and Data Relay Satellite System (TDRSS). The S and Ku-Band LNA's each employ a single stage parametric amplifier and provide state-of-the-art noise temperatures of less than 65K and 140K over their respective 2.2-2.3 GHz and 14.89-15.12...
This paper describes the development of an ultra-low noise two-stage Ku-band parametric amplifier assembly for space communication ground station receiver application. This paramp is designed for 75/spl deg/K noise temperature capability over the 14.7 - 15.2 GHz frequency range without the use of cryogenic cooling. This extremely low noise performance is made possible by the use therein of ultra high...
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