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This paper presents the first proof-of-concept 3D integration using fluidic self-assembly of chip-scale parts (2000$\,\times\,$ 2000$\,\times\,$ 100 $\mu{\rm m}^{3}$ ) at an air-water-solid interface. Four-layer 3D integration is achieved by assembling new parts over previously assembled parts. Assembly proceeds as an assembly substrate is pulled up through an air-water interface and electrical...
This paper presents de-ionized water droplets used as torque-generating micro-bearings between a glass plate and a micromachined Si substrate. The pattern on the Si substrate includes circular tracks, which allow droplet motion in a single direction. When vertical vibration is applied to the system, a rotation in the transverse plane is triggered. The system can be tailored to respond to a specific...
A novel packaging method for an intraocular pressure (IOP) sensor is presented. The device, which will be implanted during cataract surgery, is 5.75 mm in radius and has to be folded to pass through an incision of 2–3 mm. A solder-filled microchannel approach is used for the antenna fabrication and packaging. A prototype of the device is tested at 1.5 GHz. A plot comparing the transmitted and received...
This paper presents a fabrication method for biochemical sensors employing laser-activated protein deposition and reports the realization of an immunoglobulin G (IgG) sensor. It enables formation of multiple sensors and ELISA-like systems in a very small space. It also possesses the potential to fabricate sensors on 3D surfaces and in otherwise hard-to-reach places inside channels. The presented method...
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